Nanomagnet arrays fabricated by electrodeposition using self-assembled anodic aluminium oxide templates

• Published in: Microelectronic engineering Vol. 84; no. 5; pp. 1436 - 1439
• Main Authors: Li, Wuxia, Shen, Tiehan H.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.05.2007; Elsevier Science
• Subjects: AAO template; Applied sciences; Electrodeposition; Electronics; Exact sciences and technology; Microelectronic fabrication (materials and surfaces technology); Nanomagnet; Nanowire arrays; Self-assemble; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; 61.46.+w; Nanomagnet; AAO template; 81.07.−b; Self-assemble; Electrodeposition; 81.15.Pq; Nanowire arrays; 75.75.+a; Self assembly; Growth rate; Aspect ratio; Magnetic measurement; Microelectronic fabrication; Coercive force; 81.07.-b; Nanowires; Perpendicular magnetic anisotropy; Magnetic field; Nanostructured materials; Alternating current; Magnetic properties
• DOI: 10.1016/j.mee.2007.01.229
• ISSN: 0167-9317

A nonlithographic technique that utilizes highly ordered anodic aluminium oxide (AAO) membranes as templates has been employed to fabricate Co–Pt nanomagnet arrays. In particular, nanowire magnets with various aspect-ratios have been produced using AAO templates. For 14 nm Co 87Pt 13 nanowire arrays, an estimated areal density of about 500 Gb/in. 2 is readily achievable by an alternating current technique. It has been observed that the growth rate of nanowires reduces significantly with the increasing of electrodeposition time. Measurement of magnetic properties reveals that the coercivity and squareness obtained with the applied magnetic field parallel to the wire axis change with the nanowire length; however, there is relatively little change on the magnetic characteristics along the hard axis. An overall perpendicular magnetic anisotropy is obtained for nanowire arrays with aspect ratio ranges from 3.6 to 17, indicating the dominance of shape anisotropy for all these nanostructured magnets.