Ultraprecision laser-assisted diamond machining of single crystal Ge

• Published in: Precision engineering Vol. 65; pp. 149 - 155
• Main Authors: Shahinian, Hossein, Di, Kang, Navare, Jayesh, Bodlapati, Charan, Zaytsev, Dmytro, Ravindra, Deepak
• Format: Journal Article
• Language: English
• Published: Elsevier Inc 01.09.2020; Elsevier
• Subjects: Engineering Sciences; IR optics; Mechanical engineering; Mechanics; Optics; Photonic; Ultraprecision machining; μ-LAM; IR optics; μ-LAM; Ultraprecision machining; µ-LAM

In this paper we present an experimental study on ultraprecision machining (UPM) of single crystal Ge using the μ-LAM process. The material is oriented with the cutting plane normal to the direction. It is shown that increased hydrostatic pressures on the surface during cutting by increasing the too...