Simulation and optimization of a 6H-SiC metal-semiconductor-metal ultraviolet photodetector - 陈斌 杨银堂 李跃进 刘红霞 (Journal of semiconductors, 2010)
Keywords: 6H碳化硅; MSM光探测器; 仿真; 优化; 热电子发射; 电极间距; 紫外探测器; 金属半导体