Machine Learning Aided Device Simulation of Work Function Fluctuation for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs - Akbar, Chandni; Li, Yiming; Sung, Wen Li (IEEE transactions on electron devices, 2021)
Keywords: Algorithms; Data models; Errors; Gallium arsenide; Gate-all-around (GAA); Machine learning; machine learning (ML); MOSFET; MOSFETs; nanosheet (NS); Nanosheets; Predictive models; random forest regressor (RFR); Semiconductor device modeling; Silicon; Simulation; Solid modeling; work function fluctuation (WKF); Work functions