Roles of excess minority carrier recombination and chemisorbed O2 species at SiO2/Si interfaces in Si dry oxidation: Comparison between p-Si(001) and n-Si(001) surfaces - Tsuda, Yasutaka; Yoshigoe, Akitaka; Ogawa, Shuichi; Sakamoto, Tetsuya; Yamamoto, Yoshiki; Yamamoto, Yukio; Takakuwa, Yuji (The Journal of chemical physics, 2022)
Keywords: Adsorption; Carrier recombination; Electron states; Minority carriers; Oxidation; Photoexcitation; Photovoltaic effect; Point defects; Silicon dioxide; Surface chemistry