Shape evolution of high aspect ratio holes on Si(001) during hydrogen annealing - Sudoh, K.; Hiruta, R.; Kuribayashi, H. (Journal of applied physics, 2013)
Keywords: Anisotropy; Annealing; Applied physics; Computer simulation; Continuums; Dynamic tests; Evolution; High aspect ratio; Hydrogen; Instability; Silicon substrates; Stability; Surface energy; Surface stability