Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining
With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for light emitting device, head-up display for windscreen of a car, and compensation lens for la...
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Published in | International journal of precision engineering and manufacturing Vol. 25; no. 4; pp. 851 - 874 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
Seoul
Korean Society for Precision Engineering
01.04.2024
Springer Nature B.V |
Subjects | |
Online Access | Get full text |
ISSN | 2234-7593 2005-4602 |
DOI | 10.1007/s12541-023-00913-5 |
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Abstract | With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for light emitting device, head-up display for windscreen of a car, and compensation lens for laser light, etc., those manufactures require the so-called fast tool servo (FTS) or slow tool servo (STS) technology. Different to the STS, the FTS is to employ an auxiliary device of tool holder incorporating with the machine tool. In this review article, an overview of FTS is provided. In the beginning, the classifications of FTS based on motion- and actuator-type are presented. Practical FTSs constructed by piezoelectric, electromagnetic, and magnetostrictive actuators are described. Then, the content is expanded to the piezoelectric FTS including its main components, characteristics of piezoelectric actuator, displacement amplification mechanisms based on flexure hinge, multiple-actuator, hydraulic bellows-type, and hybrid-actuator. In addition to the applications of micro/ultraprecision machining conducted by the STS, the piezoelectric FTS that can provide further unique applications such as non-axisymmetric aspheric machining, on-machine measurement, vibration-assisted machining, axis error compensation, and active vibration control are addressed. Moreover, the control strategies for the piezoelectric FTS are introduced, and the progress of multi-axis piezoelectric FTS is described. Finally, the challenges and perspective of the FTS are mentioned, and a conclusion is made. Through this article, the fundamental knowledge of FTS can be acquired. This is helpful in further developments and practical applications of FTS. |
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AbstractList | With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for light emitting device, head-up display for windscreen of a car, and compensation lens for laser light, etc., those manufactures require the so-called fast tool servo (FTS) or slow tool servo (STS) technology. Different to the STS, the FTS is to employ an auxiliary device of tool holder incorporating with the machine tool. In this review article, an overview of FTS is provided. In the beginning, the classifications of FTS based on motion- and actuator-type are presented. Practical FTSs constructed by piezoelectric, electromagnetic, and magnetostrictive actuators are described. Then, the content is expanded to the piezoelectric FTS including its main components, characteristics of piezoelectric actuator, displacement amplification mechanisms based on flexure hinge, multiple-actuator, hydraulic bellows-type, and hybrid-actuator. In addition to the applications of micro/ultraprecision machining conducted by the STS, the piezoelectric FTS that can provide further unique applications such as non-axisymmetric aspheric machining, on-machine measurement, vibration-assisted machining, axis error compensation, and active vibration control are addressed. Moreover, the control strategies for the piezoelectric FTS are introduced, and the progress of multi-axis piezoelectric FTS is described. Finally, the challenges and perspective of the FTS are mentioned, and a conclusion is made. Through this article, the fundamental knowledge of FTS can be acquired. This is helpful in further developments and practical applications of FTS. With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for light emitting device, head-up display for windscreen of a car, and compensation lens for laser light, etc., those manufactures require the so-called fast tool servo (FTS) or slow tool servo (STS) technology. Different to the STS, the FTS is to employ an auxiliary device of tool holder incorporating with the machine tool. In this review article, an overview of FTS is provided. In the beginning, the classifications of FTS based on motion- and actuator-type are presented. Practical FTSs constructed by piezoelectric, electromagnetic, and magnetostrictive actuators are described. Then, the content is expanded to the piezoelectric FTS including its main components, characteristics of piezoelectric actuator, displacement amplification mechanisms based on flexure hinge, multiple-actuator, hydraulic bellows-type, and hybrid-actuator. In addition to the applications of micro/ultraprecision machining conducted by the STS, the piezoelectric FTS that can provide further unique applications such as non-axisymmetric aspheric machining, on-machine measurement, vibration-assisted machining, axis error compensation, and active vibration control are addressed. Moreover, the control strategies for the piezoelectric FTS are introduced, and the progress of multi-axis piezoelectric FTS is described. Finally, the challenges and perspective of the FTS are mentioned, and a conclusion is made. Through this article, the fundamental knowledge of FTS can be acquired. This is helpful in further developments and practical applications of FTS. |
Author | Liu, Yung-Tien |
Author_xml | – sequence: 1 givenname: Yung-Tien orcidid: 0000-0001-7298-7017 surname: Liu fullname: Liu, Yung-Tien email: ytliu@nkust.edu.tw organization: Department of Mechatronics Engineering, National Kaohsiung University of Science and Technology |
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Keywords | Voice-coil motor Fast tool servo Piezoelectric actuator Sliding mode control Micro/ultraprecision machining On-machine measurement |
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Title | Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining |
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