Design and characterization of a plasma chamber for improved radial and axial film uniformity

• Published in: Plasma processes and polymers Vol. 17; no. 8
• Main Authors: Radjef, Racim, Jarvis, Karyn, Fox, Bronwyn L., McArthur, Sally L.
• Format: Journal Article
• Language: English
• Published: Weinheim Wiley Subscription Services, Inc 01.08.2020
• Subjects: Acrylic acid; Configurations; Electrodes; ellipsometry; Langmuir probes; Plasma; plasma polymerization; Polymer films; Silicon wafers; Substrates; Thickness

Film uniformity is an issue in many deposition processes, especially in substrates with elongated lateral dimensions such as fibers. In this study, a plasma chamber was designed with dual electrodes to improve the uniformity of plasma polymer films. Plasma‐polymerized acrylic acid films were deposit...