Deactivation of metastable single-crystal silicon hyperdoped with sulfur - Simmons, C. B.; Akey, Austin J.; Krich, Jacob J.; Sullivan, Joseph T.; Recht, Daniel; Aziz, Michael J.; Buonassisi, Tonio (Journal of applied physics, 2013)
Keywords: ABSORPTION; ACTIVATION ENERGY; ANNEALING; Applied physics; Broadband; DEACTIVATION; DIFFUSION; DOPED MATERIALS; Electron transport; Electronics; ENERGY BEAM DEPOSITION; Energy gap; Heat treatment; ION IMPLANTATION; Laser beam melting; LASER RADIATION; MATERIALS SCIENCE; MELTING; METASTABLE STATES; MONOCRYSTALS; Optical data processing; Optical properties; PHOTONS; Pulsed lasers; SILICON; Single crystals; SOLID SOLUTIONS; SULFUR; SULFUR COMPLEXES; Transformations