APA (7th ed.) Citation

Simmons, C. B., Akey, A. J., Krich, J. J., Sullivan, J. T., Recht, D., Aziz, M. J., & Buonassisi, T. (2013). Deactivation of metastable single-crystal silicon hyperdoped with sulfur. Journal of applied physics, 114(24), . https://doi.org/10.1063/1.4854835

Chicago Style (17th ed.) Citation

Simmons, C. B., Austin J. Akey, Jacob J. Krich, Joseph T. Sullivan, Daniel Recht, Michael J. Aziz, and Tonio Buonassisi. "Deactivation of Metastable Single-crystal Silicon Hyperdoped with Sulfur." Journal of Applied Physics 114, no. 24 (2013). https://doi.org/10.1063/1.4854835.

MLA (9th ed.) Citation

Simmons, C. B., et al. "Deactivation of Metastable Single-crystal Silicon Hyperdoped with Sulfur." Journal of Applied Physics, vol. 114, no. 24, 2013, https://doi.org/10.1063/1.4854835.