Fatigue Life Prediction Criterion for Micro-Nanoscale Single-Crystal Silicon Structures

• Published in: Journal of microelectromechanical systems Vol. 18; no. 1; pp. 129 - 137
• Main Authors: Namazu, T., Isono, Y.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.02.2009; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Atomic force microscope (AFM); Atomic force microscopy; Atomic structure; Deformation; durability; Exact sciences and technology; Fatigue; Fatigue failure; Fatigue life; fatigue life prediction; Frequency; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Life estimation; Life testing; Lifetime estimation; Mechanical instruments, equipment and techniques; Metallurgy; Microelectromechanical systems; Micromechanical devices and systems; Nanostructure; Physics; reliability; resolved shear stress; Scanning electron microscopy; Silicon; Single crystals; single-crystal silicon (SCS); size effect; Stress; Stresses; Temperature dependence; Tensile stress; fatigue; fatigue life prediction; durability; reliability; resolved shear stress; Atomic force microscope (AFM); single-crystal silicon (SCS); size effect; Atomic force microscopy; Nanostructures; Fatigue fracture; Size effect; Silicon; Damage; Microelectromechanical device; Crystal structure; Nanohardness; Fatigue life; Temperature dependence; Scanning electron microscopy; Fatigue testing; Nanoindentation; Durability; Fatigue; Indentation; Microhardness; Monocrystals; Nanotechnology

This paper describes fatigue damage evaluation for micro-nanoscale single-crystal silicon (SCS) structures toward the reliable design of microelectromechanical systems subjected to fluctuating stresses. The fatigue tests, by using atomic force microscope (AFM), nanoindentation tester, and specially...