Junctionless Silicon-based Device for CO2 and N2O Gas Detection at Room Temperature
This article presents a fabrication of junctionless sub-micron silicon wire based device by means of atomic force microscope nanolithography for carbon dioxide and nitrous oxide gas detection. The final product was obtained after a sequence step of silicon and silicon dioxide etching process. The de...
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Published in | Procedia manufacturing Vol. 2; pp. 385 - 391 |
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Format | Journal Article |
Language | English |
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Elsevier B.V
2015
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Abstract | This article presents a fabrication of junctionless sub-micron silicon wire based device by means of atomic force microscope nanolithography for carbon dioxide and nitrous oxide gas detection. The final product was obtained after a sequence step of silicon and silicon dioxide etching process. The device consisted of three parallel sub-micron silicon wires which connected to two adjacent contact pads. The obtained silicon wires width ranging between 233nm to 340nm which fabricated under a controlled environment. This experiment utilized the use of silicon-on-insulator wafer as a raw material and atomic force microscope nanolithography as a method to fabricate the device structure. The bare device was electrically characterized using semiconductor parameter analyzer and behaved as a resistor where there was a current flow from one contact point to another contact point. The functionality of the fabricated junctionless device was prolonged by tested the device under gaseous environment at room temperature. The device resistivity was increased upon exposure to both target gases compared with before gas exposure. The response time and recovery time of the device was observed to be less than 1minute for both target gases. The fabricated junctionless sub-micron silicon device showed higher sensitivity to carbon dioxide gas which calculated to be 138%. |
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AbstractList | This article presents a fabrication of junctionless sub-micron silicon wire based device by means of atomic force microscope nanolithography for carbon dioxide and nitrous oxide gas detection. The final product was obtained after a sequence step of silicon and silicon dioxide etching process. The device consisted of three parallel sub-micron silicon wires which connected to two adjacent contact pads. The obtained silicon wires width ranging between 233nm to 340nm which fabricated under a controlled environment. This experiment utilized the use of silicon-on-insulator wafer as a raw material and atomic force microscope nanolithography as a method to fabricate the device structure. The bare device was electrically characterized using semiconductor parameter analyzer and behaved as a resistor where there was a current flow from one contact point to another contact point. The functionality of the fabricated junctionless device was prolonged by tested the device under gaseous environment at room temperature. The device resistivity was increased upon exposure to both target gases compared with before gas exposure. The response time and recovery time of the device was observed to be less than 1minute for both target gases. The fabricated junctionless sub-micron silicon device showed higher sensitivity to carbon dioxide gas which calculated to be 138%. |
Author | Asmah, M.T. Hutagalung, S.D. Sidek, O. |
Author_xml | – sequence: 1 givenname: M.T. surname: Asmah fullname: Asmah, M.T. email: asmaht@uthm.edu.my organization: Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia (UTHM), Batu Pahat 86400, Malaysia – sequence: 2 givenname: O. surname: Sidek fullname: Sidek, O. organization: Universiti Sains Malaysia (USM), Nibong Tebal 14300, Malaysia – sequence: 3 givenname: S.D. surname: Hutagalung fullname: Hutagalung, S.D. organization: Universiti Sains Malaysia (USM), Nibong Tebal 14300, Malaysia |
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Keywords | Junctionless Room Temperature AFM nanolithography Gas sensing device |
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References | Fine, Cavanagh, Afonja, Binions (bib0170) 2010; 10 Dresselhaus, Lin, Robin, Black, Dresselhaus (bib0025) 2003 Zhang, Zhang, Huang, Luo, Tay, Lim, Kang, Chen (bib0070) 2010; 146 Lu, Yang, Qu, Shen, Yu (bib0015) 2007; 71 Tsai, Chiang, Sun, Lin, Tsai, Chang, Chen (bib0085) 2011; 22 Zhong, Yang, Charles (bib0120) 2007 Talin, Hunter, Léonard, Rokad (bib0075) 2006; 89 Peng, Wang, Lee (bib0105) 2009; 95 Demami, Ni, Rogel, Salaun, Pichon (bib0095) 2010; 5 Patolsky, Charles (bib0065) 2005 Li, Chen, Li, Kamins, Nauka, Williams (bib0060) 2004; 4 Lee, Jeon, Lee, Choi, Jung, Kim, Jo (bib0080) 2009; 55 Y. Wan, J. Sha, B. Chen, Y. Fang, Z. Wang, Y. Wang, Recent Patents on Nanotechnology. 3 (1) (2009) 1-9. Z. Gao, A. Agarwal, A.D. Trigg, N. Singh, C. Fang, C.-H. Tung, Y. Fan, K.D. Buddharaju, The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, 10-14 June, Lyon, France, (2007) 2003-2006. Pennelli (bib0115) 2009; 86 Macucci, Pellegrini, Pennelli, Piotto (bib0125) 2002; 61–62 Cui, Wei, Park, Charles (bib0045) 2001; 293 C.R. Mace, B.L. Miller, in: Porous and planar silicon sensors, M. Zourob et al. (eds.), Principles of Bacterial Detection: Biosensors, Recognition Receptors and Microsystems, LLC, Springer, 2008, pp. 231-253. Vu, GhoshMoulick, Eschermann, Stockmann, Offenhäusser, Ingebrandt (bib0035) 2010; 144 Chang, You, Lin, Sheu (bib0150) 2004; 151 Joshi, Kumar (bib0165) 2011; 14 Jo, Kang, Heo, Song, Kim (bib0160) 2009; 9 Park, Li, Pisano, Williams (bib0130) 2010; 21 Hu, Lee, Kim, Yun (bib0175) 2013; 181 Wan, Gong, Jiang, Li, Tao, Zhang (bib0040) 2009; 255 Dorvel, Reddy, Bergstrom, Alam, Clare, Bashir (bib0090) 2010 Gao, Xu, Deng, Wan, Chen, Liu, Huq, Qu (bib0100) 2011; 88 Demami, Ni, Rogel, Salaun, Pichon (bib0155) 2012; 170 Colinge, Lee, Afzalian, Akhavan, Yan, Ferain, Razavi, O’Neill, Blake, White, Kelleher, McCarthy, Murphy (bib0145) 2010; 5 Zhou, Hu, Li, Ma, Lee, Lee (bib0110) 2003; 369 Martínez, Martínez, García (bib0135) 2008; 8 V.E. Bochenkov, G.B. Sergeev, in: Sensitivity, selectivity, and stability of gas-sensitive metal-oxide nanostructures. A. Umar, Y.-B. Hanh, Metal oxide nanostructures and their applications: American Scientific Publishers. 3, 2010, pp. 31-52. Han, Chang, Chen, Cheng, Wu (bib0140) 2013; 60 Kumar, Srivastava, Singh, Husain, Kumar (bib0010) 2011; 95 Agarwal, Buddharaju, Lao, Singh, Balasubramanian, Kwong (bib0030) 2008; 145–146 Gao, Agarwal, Trigg, Singh, Fang, Tung, Fan, Buddharaju, Kong (bib0055) 2007; 79 Agarwal (10.1016/j.promfg.2015.07.068_bib0030) 2008; 145–146 Macucci (10.1016/j.promfg.2015.07.068_bib0125) 2002; 61–62 Lu (10.1016/j.promfg.2015.07.068_bib0015) 2007; 71 Zhang (10.1016/j.promfg.2015.07.068_bib0070) 2010; 146 Martínez (10.1016/j.promfg.2015.07.068_bib0135) 2008; 8 Gao (10.1016/j.promfg.2015.07.068_bib0055) 2007; 79 Dorvel (10.1016/j.promfg.2015.07.068_bib0090) 2010 Jo (10.1016/j.promfg.2015.07.068_bib0160) 2009; 9 Fine (10.1016/j.promfg.2015.07.068_bib0170) 2010; 10 Wan (10.1016/j.promfg.2015.07.068_bib0040) 2009; 255 Han (10.1016/j.promfg.2015.07.068_bib0140) 2013; 60 Colinge (10.1016/j.promfg.2015.07.068_bib0145) 2010; 5 10.1016/j.promfg.2015.07.068_bib0020 Hu (10.1016/j.promfg.2015.07.068_bib0175) 2013; 181 Tsai (10.1016/j.promfg.2015.07.068_bib0085) 2011; 22 Demami (10.1016/j.promfg.2015.07.068_bib0095) 2010; 5 Talin (10.1016/j.promfg.2015.07.068_bib0075) 2006; 89 10.1016/j.promfg.2015.07.068_bib0005 Kumar (10.1016/j.promfg.2015.07.068_bib0010) 2011; 95 Chang (10.1016/j.promfg.2015.07.068_bib0150) 2004; 151 Park (10.1016/j.promfg.2015.07.068_bib0130) 2010; 21 Patolsky (10.1016/j.promfg.2015.07.068_bib0065) 2005 10.1016/j.promfg.2015.07.068_bib0180 Gao (10.1016/j.promfg.2015.07.068_bib0100) 2011; 88 Cui (10.1016/j.promfg.2015.07.068_bib0045) 2001; 293 Lee (10.1016/j.promfg.2015.07.068_bib0080) 2009; 55 Demami (10.1016/j.promfg.2015.07.068_bib0155) 2012; 170 Pennelli (10.1016/j.promfg.2015.07.068_bib0115) 2009; 86 Vu (10.1016/j.promfg.2015.07.068_bib0035) 2010; 144 Li (10.1016/j.promfg.2015.07.068_bib0060) 2004; 4 Joshi (10.1016/j.promfg.2015.07.068_bib0165) 2011; 14 10.1016/j.promfg.2015.07.068_bib0050 Peng (10.1016/j.promfg.2015.07.068_bib0105) 2009; 95 Dresselhaus (10.1016/j.promfg.2015.07.068_bib0025) 2003 Zhong (10.1016/j.promfg.2015.07.068_bib0120) 2007 Zhou (10.1016/j.promfg.2015.07.068_bib0110) 2003; 369 |
References_xml | – volume: 89 year: 2006 ident: bib0075 publication-title: Appl. Phys. Lett contributor: fullname: Rokad – volume: 8 start-page: 3636 year: 2008 end-page: 3639 ident: bib0135 publication-title: Nano Letters contributor: fullname: García – start-page: 1871 year: 2010 end-page: 1873 ident: bib0090 publication-title: 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 3-7 October, Groningen, The Netherlands contributor: fullname: Bashir – volume: 10 start-page: 5469 year: 2010 end-page: 5502 ident: bib0170 publication-title: Sensors contributor: fullname: Binions – volume: 71 start-page: 211 year: 2007 end-page: 216 ident: bib0015 publication-title: Bioelectrochemistry contributor: fullname: Yu – start-page: 1 year: 2003 end-page: 88 ident: bib0025 publication-title: Nanowires contributor: fullname: Dresselhaus – volume: 14 start-page: 52 year: 2011 ident: bib0165 publication-title: Material today. contributor: fullname: Kumar – volume: 144 start-page: 354 year: 2010 end-page: 360 ident: bib0035 publication-title: Sensors and Actuators B. contributor: fullname: Ingebrandt – volume: 293 start-page: 1289 year: 2001 ident: bib0045 publication-title: Science contributor: fullname: Charles – volume: 95 start-page: 215 year: 2011 end-page: 218 ident: bib0010 publication-title: Solar energy Materials & Solar Cells. contributor: fullname: Kumar – volume: 86 start-page: 2139 year: 2009 end-page: 2143 ident: bib0115 publication-title: Microelectronic Engineering contributor: fullname: Pennelli – volume: 79 start-page: 3291 year: 2007 end-page: 3297 ident: bib0055 publication-title: Anal. Chem contributor: fullname: Kong – volume: 95 start-page: 243112 year: 2009 ident: bib0105 publication-title: Applied Physics Letters. contributor: fullname: Lee – volume: 5 start-page: 351 year: 2010 end-page: 354 ident: bib0095 publication-title: Procedia Engineering contributor: fullname: Pichon – volume: 60 start-page: 1807 year: 2013 end-page: 1812 ident: bib0140 publication-title: IEEE Transactions on Electron Devices. contributor: fullname: Wu – volume: 145–146 start-page: 207 year: 2008 end-page: 213 ident: bib0030 publication-title: Sensors and Actuators A. contributor: fullname: Kwong – volume: 55 start-page: 232 year: 2009 end-page: 235 ident: bib0080 publication-title: Journal of the Korean Physical Society. contributor: fullname: Jo – volume: 22 start-page: 1 year: 2011 end-page: 9 ident: bib0085 publication-title: Nanotechnology contributor: fullname: Chen – year: 2007 ident: bib0120 publication-title: Nanosilicon contributor: fullname: Charles – volume: 151 start-page: G679 year: 2004 end-page: G682 ident: bib0150 publication-title: Journal of The Electrochemical Society contributor: fullname: Sheu – volume: 4 start-page: 245 year: 2004 end-page: 247 ident: bib0060 publication-title: Nano Letters contributor: fullname: Williams – volume: 255 start-page: 3752 year: 2009 end-page: 3758 ident: bib0040 publication-title: Applied Surface Science. contributor: fullname: Zhang – volume: 369 start-page: 220 year: 2003 end-page: 224 ident: bib0110 publication-title: Chemical Physics Letters. contributor: fullname: Lee – volume: 146 start-page: 138 year: 2010 end-page: 144 ident: bib0070 publication-title: Sensors and Actuators B. contributor: fullname: Chen – volume: 5 start-page: 225 year: 2010 end-page: 229 ident: bib0145 publication-title: Nature Nanotechnology contributor: fullname: Murphy – volume: 88 start-page: 2100 year: 2011 end-page: 2104 ident: bib0100 publication-title: Microelectronic Engineering contributor: fullname: Qu – volume: 61–62 start-page: 701 year: 2002 end-page: 705 ident: bib0125 publication-title: Microelectronic Engineering contributor: fullname: Piotto – volume: 181 start-page: 424 year: 2013 end-page: 431 ident: bib0175 publication-title: Sensors and Actuators B. contributor: fullname: Yun – start-page: 20 year: 2005 end-page: 28 ident: bib0065 publication-title: Materials Today contributor: fullname: Charles – volume: 170 start-page: 158 year: 2012 end-page: 162 ident: bib0155 publication-title: Sensors and Actuators B. contributor: fullname: Pichon – volume: 21 start-page: 015501 year: 2010 ident: bib0130 publication-title: Nanotechnology contributor: fullname: Williams – volume: 9 start-page: e235 year: 2009 end-page: e238 ident: bib0160 publication-title: Current Applied Physics. contributor: fullname: Kim – volume: 95 start-page: 215 year: 2011 ident: 10.1016/j.promfg.2015.07.068_bib0010 publication-title: Solar energy Materials & Solar Cells. doi: 10.1016/j.solmat.2010.04.024 contributor: fullname: Kumar – volume: 79 start-page: 3291 year: 2007 ident: 10.1016/j.promfg.2015.07.068_bib0055 publication-title: Anal. Chem doi: 10.1021/ac061808q contributor: fullname: Gao – volume: 5 start-page: 351 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0095 publication-title: Procedia Engineering doi: 10.1016/j.proeng.2010.09.120 contributor: fullname: Demami – volume: 145–146 start-page: 207 year: 2008 ident: 10.1016/j.promfg.2015.07.068_bib0030 publication-title: Sensors and Actuators A. doi: 10.1016/j.sna.2007.12.019 contributor: fullname: Agarwal – year: 2007 ident: 10.1016/j.promfg.2015.07.068_bib0120 publication-title: Nanosilicon contributor: fullname: Zhong – volume: 4 start-page: 245 issue: 2 year: 2004 ident: 10.1016/j.promfg.2015.07.068_bib0060 publication-title: Nano Letters doi: 10.1021/nl034958e contributor: fullname: Li – volume: 22 start-page: 1 year: 2011 ident: 10.1016/j.promfg.2015.07.068_bib0085 publication-title: Nanotechnology contributor: fullname: Tsai – start-page: 1871 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0090 publication-title: 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 3-7 October, Groningen, The Netherlands contributor: fullname: Dorvel – volume: 293 start-page: 1289 issue: 5533 year: 2001 ident: 10.1016/j.promfg.2015.07.068_bib0045 publication-title: Science doi: 10.1126/science.1062711 contributor: fullname: Cui – volume: 255 start-page: 3752 year: 2009 ident: 10.1016/j.promfg.2015.07.068_bib0040 publication-title: Applied Surface Science. doi: 10.1016/j.apsusc.2008.10.025 contributor: fullname: Wan – start-page: 20 year: 2005 ident: 10.1016/j.promfg.2015.07.068_bib0065 publication-title: Materials Today doi: 10.1016/S1369-7021(05)00791-1 contributor: fullname: Patolsky – volume: 21 start-page: 015501 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0130 publication-title: Nanotechnology doi: 10.1088/0957-4484/21/1/015501 contributor: fullname: Park – volume: 181 start-page: 424 year: 2013 ident: 10.1016/j.promfg.2015.07.068_bib0175 publication-title: Sensors and Actuators B. doi: 10.1016/j.snb.2013.01.084 contributor: fullname: Hu – volume: 144 start-page: 354 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0035 publication-title: Sensors and Actuators B. doi: 10.1016/j.snb.2008.11.048 contributor: fullname: Vu – volume: 14 start-page: 52 issue: 12 year: 2011 ident: 10.1016/j.promfg.2015.07.068_bib0165 publication-title: Material today. doi: 10.1016/S1369-7021(11)70034-7 contributor: fullname: Joshi – volume: 88 start-page: 2100 year: 2011 ident: 10.1016/j.promfg.2015.07.068_bib0100 publication-title: Microelectronic Engineering doi: 10.1016/j.mee.2011.02.044 contributor: fullname: Gao – volume: 95 start-page: 243112 year: 2009 ident: 10.1016/j.promfg.2015.07.068_bib0105 publication-title: Applied Physics Letters. doi: 10.1063/1.3275794 contributor: fullname: Peng – volume: 9 start-page: e235 year: 2009 ident: 10.1016/j.promfg.2015.07.068_bib0160 publication-title: Current Applied Physics. doi: 10.1016/j.cap.2009.06.053 contributor: fullname: Jo – volume: 5 start-page: 225 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0145 publication-title: Nature Nanotechnology doi: 10.1038/nnano.2010.15 contributor: fullname: Colinge – volume: 86 start-page: 2139 year: 2009 ident: 10.1016/j.promfg.2015.07.068_bib0115 publication-title: Microelectronic Engineering doi: 10.1016/j.mee.2009.02.032 contributor: fullname: Pennelli – volume: 71 start-page: 211 year: 2007 ident: 10.1016/j.promfg.2015.07.068_bib0015 publication-title: Bioelectrochemistry doi: 10.1016/j.bioelechem.2007.05.003 contributor: fullname: Lu – start-page: 1 year: 2003 ident: 10.1016/j.promfg.2015.07.068_bib0025 publication-title: Nanowires contributor: fullname: Dresselhaus – ident: 10.1016/j.promfg.2015.07.068_bib0050 – volume: 8 start-page: 3636 issue: 11 year: 2008 ident: 10.1016/j.promfg.2015.07.068_bib0135 publication-title: Nano Letters doi: 10.1021/nl801599k contributor: fullname: Martínez – ident: 10.1016/j.promfg.2015.07.068_bib0180 – volume: 369 start-page: 220 year: 2003 ident: 10.1016/j.promfg.2015.07.068_bib0110 publication-title: Chemical Physics Letters. doi: 10.1016/S0009-2614(02)02008-0 contributor: fullname: Zhou – volume: 151 start-page: G679 issue: 10 year: 2004 ident: 10.1016/j.promfg.2015.07.068_bib0150 publication-title: Journal of The Electrochemical Society doi: 10.1149/1.1795254 contributor: fullname: Chang – volume: 60 start-page: 1807 issue: 6 year: 2013 ident: 10.1016/j.promfg.2015.07.068_bib0140 publication-title: IEEE Transactions on Electron Devices. doi: 10.1109/TED.2013.2256137 contributor: fullname: Han – volume: 146 start-page: 138 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0070 publication-title: Sensors and Actuators B. doi: 10.1016/j.snb.2010.02.021 contributor: fullname: Zhang – volume: 61–62 start-page: 701 year: 2002 ident: 10.1016/j.promfg.2015.07.068_bib0125 publication-title: Microelectronic Engineering doi: 10.1016/S0167-9317(02)00439-2 contributor: fullname: Macucci – ident: 10.1016/j.promfg.2015.07.068_bib0020 doi: 10.2174/187221009787003348 – volume: 89 year: 2006 ident: 10.1016/j.promfg.2015.07.068_bib0075 publication-title: Appl. Phys. Lett doi: 10.1063/1.2358214 contributor: fullname: Talin – volume: 170 start-page: 158 year: 2012 ident: 10.1016/j.promfg.2015.07.068_bib0155 publication-title: Sensors and Actuators B. doi: 10.1016/j.snb.2011.04.083 contributor: fullname: Demami – volume: 55 start-page: 232 issue: 1 year: 2009 ident: 10.1016/j.promfg.2015.07.068_bib0080 publication-title: Journal of the Korean Physical Society. doi: 10.3938/jkps.55.232 contributor: fullname: Lee – volume: 10 start-page: 5469 year: 2010 ident: 10.1016/j.promfg.2015.07.068_bib0170 publication-title: Sensors doi: 10.3390/s100605469 contributor: fullname: Fine – ident: 10.1016/j.promfg.2015.07.068_bib0005 |
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Title | Junctionless Silicon-based Device for CO2 and N2O Gas Detection at Room Temperature |
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