Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach - Song, Fazhi; Liu, Yang; Jin, Wen; Tan, Jiubin; He, Wei (IEEE transaction on neural networks and learning systems, 2022)
Keywords: Control methods; Convergence; Data driven; Feedforward control; Feedforward systems; force ripple; Integrated circuits; iterative learning control (ILC); Iterative methods; Learning; Parameterization; Performance enhancement; Radio frequency; Robustness; Servomotors; Stochastic processes; Stochasticity; Task analysis; Variable gain