3-D surface stereometry studies of sputtered TiN thin films obtained at different substrate temperatures - Stach, Sebastian; Sapota, Wiktoria; Ţălu, Ştefan; Ahmadpourian, Azin; Luna, Carlos; Ghobadi, Nader; Arman, Ali; Ganji, Mohsen (Journal of materials science. Materials in electronics, 2017)
Keywords: Atomic force microscopy; Characterization and Evaluation of Materials; Chemistry and Materials Science; Curvature; Dependence; Electronics; Glass substrates; Image segmentation; Magnetron sputtering; Materials Science; Mathematical analysis; Morphology; Mountains; Optical and Electronic Materials; Substrates; Surface properties; Temperature; Thin films; Titanium nitride; Topography; Substrate Temperature; Titanium Nitride; Reactive Magnetron; Wear Resistant Coating; Motif Point