APA (7th ed.) Citation

Stach, S., Sapota, W., Ţălu, Ş., Ahmadpourian, A., Luna, C., Ghobadi, N., . . . Ganji, M. (2017). 3-D surface stereometry studies of sputtered TiN thin films obtained at different substrate temperatures. Journal of materials science. Materials in electronics, 28(2), 2113-2122. https://doi.org/10.1007/s10854-016-5774-9

Chicago Style (17th ed.) Citation

Stach, Sebastian, Wiktoria Sapota, Ştefan Ţălu, Azin Ahmadpourian, Carlos Luna, Nader Ghobadi, Ali Arman, and Mohsen Ganji. "3-D Surface Stereometry Studies of Sputtered TiN Thin Films Obtained at Different Substrate Temperatures." Journal of Materials Science. Materials in Electronics 28, no. 2 (2017): 2113-2122. https://doi.org/10.1007/s10854-016-5774-9.

MLA (9th ed.) Citation

Stach, Sebastian, et al. "3-D Surface Stereometry Studies of Sputtered TiN Thin Films Obtained at Different Substrate Temperatures." Journal of Materials Science. Materials in Electronics, vol. 28, no. 2, 2017, pp. 2113-2122, https://doi.org/10.1007/s10854-016-5774-9.