Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices

Direct patterning technology holds significant promise owing to its ability to streamline complex patterning processes, fostering affordable design and production of various devices. Direct optical lithographic techniques have recently been applied to diverse ranges of functional inorganic nanomater...

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Bibliographic Details
Published inAdvanced Physics Research Vol. 3; no. 1
Main Authors Baek, Seongheon, Son, Jae Sung
Format Journal Article
LanguageEnglish
Published Edinburgh John Wiley & Sons, Inc 01.01.2024
Wiley-VCH
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