Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices
Direct patterning technology holds significant promise owing to its ability to streamline complex patterning processes, fostering affordable design and production of various devices. Direct optical lithographic techniques have recently been applied to diverse ranges of functional inorganic nanomater...
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Published in | Advanced Physics Research Vol. 3; no. 1 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Edinburgh
John Wiley & Sons, Inc
01.01.2024
Wiley-VCH |
Subjects | |
Online Access | Get full text |
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