MOPA pulsed fiber laser for silicon scribing

• Published in: Optics and laser technology Vol. 80; pp. 67 - 71
• Main Authors: Yang, Limei, Huang, Wei, Deng, Mengmeng, Li, Feng
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.06.2016
• Subjects: Ablation; Fiber laser; Fiber lasers; Laser ablation; Lasers; Mathematical models; MOPA; Oscillators; Pulse width; Scanning; Silicon; Subject classification codes; Surface temperature; Thermal model; Fiber laser; 140.6810; MOPA; Surface temperature; Subject classification codes; Silicon; Laser ablation; Thermal model; 140.3538; 140.3615; 140.3390

A 1064nm master oscillator power amplifier (MOPA) pulsed fiber laser is developed with flexible control over the pulse width, repetition frequency and peak power, and it is used to investigate the dependence of mono-crystalline silicon scribe depth on the laser pulse width, scanning speed and repeat...