Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma - 王虹宇 姜巍 孙鹏 赵双云 李阳 (Plasma science & technology, 2016)
Keywords: Computer simulation; Coupling; Discharge; Electrodes; Joining; Monte Carlo methods; Particle in cell technique; Radio frequencies; 分子组织; 注射剂; 等离子体; 超声波