赵颖, 侯. 耿. 张. 孙. 张. (2011). Evolution of infrared spectra and optical emission spectra in hydrogenated silicon thin films prepared by VHF-PECVD. Chinese physics B, 20(7), 440-445. https://doi.org/10.1088/1674-1056/20/7/077802
Chicago Style (17th ed.) Citation赵颖, 侯国付 耿新华 张晓丹 孙建 张建军. "Evolution of Infrared Spectra and Optical Emission Spectra in Hydrogenated Silicon Thin Films Prepared by VHF-PECVD." Chinese Physics B 20, no. 7 (2011): 440-445. https://doi.org/10.1088/1674-1056/20/7/077802.
MLA (9th ed.) Citation赵颖, 侯国付 耿新华 张晓丹 孙建 张建军. "Evolution of Infrared Spectra and Optical Emission Spectra in Hydrogenated Silicon Thin Films Prepared by VHF-PECVD." Chinese Physics B, vol. 20, no. 7, 2011, pp. 440-445, https://doi.org/10.1088/1674-1056/20/7/077802.
Warning: These citations may not always be 100% accurate.