Morphology enhancement of SiO2 aerogel films grown on Si substrate using dense SiO2 buffer layer

• Published in: Rare metals Vol. 42; no. 7; pp. 2457 - 2461
• Main Authors: Sun, Xiang-Yu, Wu, Chuan-Gui, Luo, Wen-Bo, Shuai, Yao, Zhang, Wang-Li
• Format: Journal Article
• Language: English
• Published: Beijing Nonferrous Metals Society of China 01.07.2023; Springer Nature B.V
• Subjects: Aerogels; Biomaterials; Buffer layers; Chemistry and Materials Science; Energy; Materials Engineering; Materials Science; Metallic Materials; Morphology; Nanoscale Science and Technology; Optical microscopes; Physical Chemistry; Silicon dioxide; Silicon substrates; Sol-gel processes; Spin coating; Temperature; aerogel film; SiO; Si substrate; Surface morphology; buffer layer

Porous SiO 2 film has been widely studied due to its extensive applications in many fields. This paper presents a newly produced porous SiO 2 film made by traditional sol–gel method. Bare Si and Si with SiO 2 buffer layer were used as substrate. The SiO 2 buffer layer was 500 nm in thickness and was...