Growth of N-polarity InN by ArF-laser assisted MOVPE

• Published in: Physica status solidi. A, Applications and materials science Vol. 203; no. 1; pp. 112 - 115
• Main Authors: Yamamoto, A., Kasashima, K., Miyanishi, M., Hashimoto, A.
• Format: Journal Article
• Language: English
• Published: Berlin WILEY-VCH Verlag 01.01.2006; WILEY‐VCH Verlag
• Subjects: 81.05.Ea; 81.15.Gh; 81.16.Mk; 82.33.Ya

In this paper, the employment of the ArF excimer‐laser assisted nitridation of sapphire substrate is studied in the ArF‐laser assisted MOVPE (la‐MOVPE) of InN. An ArF excimer laser with an energy 50 mJ/pulse and a repetition rate 20 Hz is introduced parallel to the substrate surface. The surface mor...