X-ray investigation of annealed CeO2 films prepared by sputtering on Si substrates

• Published in: Thin solid films Vol. 515; no. 20-21; pp. 8078 - 8081
• Main Authors: IORDANOVA, I, POPOVA, L, ALEKSANDROVA, P, BESHKOV, G, VLAHKOV, E, MIRCHEV, R, BLAGOEV, B
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier Science 31.07.2007
• Subjects: Composition and phase identification; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Interlayers; Temperature dependence; Phase composition; Polycrystals; CeO2/Si system; Sputtering; Thin films; Time dependence; Magnetrons; Rapid thermal annealing; Silicon oxides; p n junctions; X-ray investigations; Cerium oxides; Radiofrequency sputtering; RTA; Crystal structure