Controlled growth of MoS2 by atomic layer deposition on patterned gold pads - Yue, Chenxi; Wang, Yang; Liu, Hao; Chen, Lin; Zhu, Hao; Sun, Qingqing (Journal of crystal growth, 2020)
Keywords: A3. Atomic layer deposition; Atomic layer epitaxy; B1. Sulfides; B2. Semiconducting materials; Chemical vapor deposition; Electrocatalysts; Film growth; Hydrogen evolution reactions; Molybdenum disulfide; Nanoelectronics; Optoelectronics; Sapphire; Silicon dioxide; Silicon substrates; Thin films; A3. Atomic layer deposition; B1. Sulfides; B2. Semiconducting materials