Inhibition of Anti-Reflection Film Cracks on Plastic Substrates Using Nanolaminate Layer Deposition in Plasma-Enhanced Atomic Layer Deposition

• Published in: Technologies (Basel) Vol. 13; no. 1; p. 11
• Main Authors: Wang, Chi-Chieh, Wang, Cheng-Fu, Li, Meng-Chi, Su, Li-Chen, Kuo, Chien-Cheng
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 01.01.2025
• Subjects: Aluminum oxide; Antireflection coatings; Atomic layer epitaxy; Composite materials; Crystallization; Design of experiments; ductility; Ductility tests; Environmental testing; Glass substrates; hafnium dioxide; Hafnium oxide; Humidity; nanolaminates; Optical properties; Oxidation; PEALD; Plasma; Substrate inhibition; Surface roughness; Temperature; Testing time; Thickness; Thin films

In this research, we mainly increase the adhesion of PMMA substrate and film, which is reflected in the environmental test. This study used plasma-enhanced atomic layer deposition (PEALD) to find the relationship between the intensity of XRD reflection peak and the root-mean-square surface roughness...