Inhibition of Anti-Reflection Film Cracks on Plastic Substrates Using Nanolaminate Layer Deposition in Plasma-Enhanced Atomic Layer Deposition - Wang, Chi-Chieh; Wang, Cheng-Fu; Li, Meng-Chi; Su, Li-Chen; Kuo, Chien-Cheng (Technologies (Basel), 2025)
Keywords: Aluminum oxide; Antireflection coatings; Atomic layer epitaxy; Composite materials; Crystallization; Design of experiments; ductility; Ductility tests; Environmental testing; Glass substrates; hafnium dioxide; Hafnium oxide; Humidity; nanolaminates; Optical properties; Oxidation; PEALD; Plasma; Substrate inhibition; Surface roughness; Temperature; Testing time; Thickness; Thin films