Molecular dynamics study of damage nearby silicon surface bombarded by energetic carbon ions - Liang, Guoying; Zhong, Haowen; Zhang, Shijian; Xu, Mofei; Kuang, Shicheng; Ren, Jianhui; Zhang, Nan; Yan, Sha; Yu, Xiao; Remnev, Gennady Efimovich; Le, Xiaoyun (Surface & coatings technology, 2020)
Keywords: Carbon; Damage; Evolution; Interstitial atom; Ion bombardment; Irradiation; Molecular dynamics; Point defect; Point defects; Silicon; Vacancy; Molecular dynamics; Interstitial atom; Damage; Vacancy; Point defect