On the Design and Modeling of a Full-Range Piezoelectric MEMS Loudspeaker for In-Ear Applications - Gazzola, Chiara; Zega, Valentina; Cerini, Fabrizio; Adorno, Silvia; Corigliano, Alberto (Journal of microelectromechanical systems, 2023)
Keywords: Acoustics; Actuation; Actuators; Air gaps; Fabrication; Harmonic distortion; IEC 60318–4 coupler; Loudspeakers; MEMS; Microelectromechanical systems; Micromechanical devices; microspeaker; Nonlinear response; Piezoelectric; Piezoelectric devices; Piezoelectricity; Pistons; Sound pressure; sound pressure level; total harmonic distortion