Spurious Suppression without Energy Dissipation in Aluminum--Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge

• Published in: Japanese Journal of Applied Physics Vol. 51; no. 7; pp. 07GC11 - 07GC11-5
• Main Authors: Hara, Motoaki, Kuwano, Hiroki
• Format: Journal Article
• Language: English
• Published: The Japan Society of Applied Physics 01.07.2012

We examined the suppression of spurious responses beneath the resonant frequency in an aluminum-nitride-based thin-film bulk acoustic resonator (FBAR) by a two-dimensional (2D) finite element method (FEM) and dispersion analysis of waves. The results confirmed that the 0th-order asymmetric mode ($A_...