Improved Performances of Acoustic Energy Harvester Fabricated Using Sol/Gel Lead Zirconate Titanate Thin Film

Energy harvesters integrable on smart sensor systems have been strongly demanded. Microelectromechanical system (MEMS) acoustic energy harvesters using the first resonance vibration of a lead zirconate titanate (PZT) thin film as a diaphragm have recently been reported. Similar acoustic energy harve...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 50; no. 6; pp. 06GM14 - 06GM14-5
Main Authors Kimura, Shu, Tomioka, Syungo, Iizumi, Satoshi, Tsujimoto, Kyohei, Sugou, Tomohisa, Nishioka, Yasushiro
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.06.2011
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