Hierarchical micro/nanostructures generated by femtosecond laser beams modified through a liquid-crystal spatial light modulator
•The hierarchical micro/nanostructures inside various shapes can be created using a femtosecond laser machining system with a liquid-crystal spatial light modulator.•Hierarchical micro/nanostructures are composed of micro-sized valley structures of 30μm spacing and nanostrucutres with a periodicity...
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Published in | Applied surface science Vol. 353; pp. 568 - 573 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
30.10.2015
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Subjects | |
Online Access | Get full text |
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