High Quality Factor and Low Motional Impedance Aluminum Nitride Tuning Fork Resonators Vibrating in In-Plane Flexural Mode

• Published in: IEEE electron device letters Vol. 43; no. 10; pp. 1744 - 1747
• Main Authors: Yuan, Yi, Yang, Qingrui, Li, Haolin, Shi, Shuai, Niu, Pengfei, Sun, Chonglin, Li, Quanning, Zhang, Menglun, Pang, Wei
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.10.2022; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: AlN; Aluminum; Aluminum nitride; Electrodes; high quality factor; III-V semiconductor materials; Impedance; low motional impedance; microelectromechanical systems; Piezoelectricity; Q factors; Resonators; Silicon; Tuning; Tuning fork resonator; Vibrations

This letter presents a piezoelectric tuning fork resonator vibrating in in-plane flexural mode with a high quality factor (Q) and low motional impedance. A novel double-sided actuating design is implemented based on unimorph structure with a 2.5-<inline-formula> <tex-math notation="LaT...