Thermal Properties of Anisotropic and/or Inhomogeneous Suspended Thin Films Assessed via Dual-Side Time-Domain Thermoreflectance: A Numerical Study

Time-domain thermoreflectance (TDTR) is a powerful method for measuring thermal properties, such as thermal conductivity and thermal boundary resistance, of a broad variety of thin-film materials and interfaces. Dual-side TDTR, in which measurements are performed on the top and bottom sides of a sus...

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Bibliographic Details
Published inNanoscale and microscale thermophysical engineering Vol. 22; no. 1; pp. 6 - 20
Main Author Cho, Jungwan
Format Journal Article
LanguageEnglish
Published Abingdon Taylor & Francis 02.01.2018
Taylor & Francis Ltd
Subjects
Anisotropy
Computer simulation
Heat conductivity
Heat transfer
Sensitivity analysis
suspended thin films
thermal boundary resistance
Thermal conductivity
Thermal properties
Thermal resistance
Thermodynamic properties
Thin films
Time domain analysis
Time-domain thermoreflectance
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Summary:Time-domain thermoreflectance (TDTR) is a powerful method for measuring thermal properties, such as thermal conductivity and thermal boundary resistance, of a broad variety of thin-film materials and interfaces. Dual-side TDTR, in which measurements are performed on the top and bottom sides of a suspended region of a thin film of interest, has recently emerged as an effective way to investigate the thermal properties of a film that is thermally anisotropic and/or inhomogeneous. Despite its experimental versatility, dual-side TDTR has yet to be fully interrogated. In this work, we examine the thermal conductivity and boundary resistance of anisotropic and/or inhomogeneous suspended thin films, extracted by dual-side TDTR on these films via numerical simulation. We start from a simple case of an anisotropic or inhomogeneous suspended membrane and then consider the combined case where the suspended membrane is both anisotropic and inhomogeneous. Taken together with analysis of measurement sensitivity, we aim to provide a general guideline for data extraction methodologies for dual-side TDTR on anisotropic and/or inhomogeneous suspended thin films.
ISSN:1556-7265
1556-7273
DOI:10.1080/15567265.2017.1405130