Local 2DEG Density Control in Heterostructures of Piezoelectric Materials and Its Application in GaN HEMT Fabrication Technology
This paper investigates the local control of two dimensional electron gas (2DEG) density in AlGaN/GaN heterostructures by applying external mechanical stress. The proposed 2DEG tuning mechanism relies on a local modification of the piezoelectric contribution to the total 2DEG concentration at an AlG...
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Published in | IEEE transactions on electron devices Vol. 65; no. 8; pp. 3176 - 3184 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.08.2018
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
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Abstract | This paper investigates the local control of two dimensional electron gas (2DEG) density in AlGaN/GaN heterostructures by applying external mechanical stress. The proposed 2DEG tuning mechanism relies on a local modification of the piezoelectric contribution to the total 2DEG concentration at an AlGaN/GaN heterostructure interface. Discontinuities of internally stressed passivation films are known to locally modify mechanical stress in their vicinity and may, therefore, transfer mechanical strain to neighboring device regions. If a mechanically stressed passivation laterally terminates at a gate trench on top of a GaN/AlGaN heterojunction, it will, therefore, induce mechanical strain into the semiconductor at the location of the trench sidewalls. This locally affects the piezoelectric polarization vector and, thus, changes 2DEG concentration in this region. As this effect directly modifies electronic properties underneath the gate electrode, a shift of threshold voltage will be the consequence. This phenomenon has been investigated by coupling mechanical and physical device simulation and by experimental verification of the simulation results. Finally, as one of the several possible application examples, normally-off (E-mode) and normally-on (D-mode) transistors were monolithically integrated on the same wafer by embedding the respective gate electrodes into passivation layers with different degrees of mechanical stress. DC measurements of the obtained transistors showed competitive performance levels. |
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AbstractList | This paper investigates the local control of two dimensional electron gas (2DEG) density in AlGaN/GaN heterostructures by applying external mechanical stress. The proposed 2DEG tuning mechanism relies on a local modification of the piezoelectric contribution to the total 2DEG concentration at an AlGaN/GaN heterostructure interface. Discontinuities of internally stressed passivation films are known to locally modify mechanical stress in their vicinity and may, therefore, transfer mechanical strain to neighboring device regions. If a mechanically stressed passivation laterally terminates at a gate trench on top of a GaN/AlGaN heterojunction, it will, therefore, induce mechanical strain into the semiconductor at the location of the trench sidewalls. This locally affects the piezoelectric polarization vector and, thus, changes 2DEG concentration in this region. As this effect directly modifies electronic properties underneath the gate electrode, a shift of threshold voltage will be the consequence. This phenomenon has been investigated by coupling mechanical and physical device simulation and by experimental verification of the simulation results. Finally, as one of the several possible application examples, normally-off (E-mode) and normally-on (D-mode) transistors were monolithically integrated on the same wafer by embedding the respective gate electrodes into passivation layers with different degrees of mechanical stress. DC measurements of the obtained transistors showed competitive performance levels. |
Author | Osipov, Konstantin Brunner, Frank Trankle, Gunter Wurfl, Joachim Ostermay, Ina Bodduluri, Maniteja |
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Cites_doi | 10.1016/j.mee.2012.10.022 10.1587/elex.6.1045 10.1063/1.369664 10.1063/1.116384 10.1063/1.2182011 10.1109/LED.2009.2033083 10.1109/TED.2007.904476 10.1143/JJAP.43.L777 10.1109/JPROC.2013.2253062 10.1109/IEDM.2004.1419112 10.1002/9783527610723 10.1063/1.1762980 10.1143/JJAP.45.L1168 10.1109/LED.2009.2038935 10.1007/978-1-4614-4337-7 10.1016/j.microrel.2009.02.015 10.23919/SISPAD.2017.8085279 |
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References | ref13 ref12 ref15 ref14 ref20 ref10 ref2 osipov (ref11) 2016 ref16 ref19 ref8 ref7 ref9 ref4 ref3 ref6 ref5 ohmaki (ref17) 2006; 45 osipov (ref18) 2018 casto (ref1) 2011 |
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Snippet | This paper investigates the local control of two dimensional electron gas (2DEG) density in AlGaN/GaN heterostructures by applying external mechanical stress.... |
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SubjectTerms | Aluminum gallium nitride Aluminum gallium nitrides Density Electrode polarization Electrodes Electron gas field-effect transistors Gallium nitride Gallium nitrides GaN HEMT HEMTs Heterojunctions Heterostructures mechanical stress MODFETs Passivation Passivity Piezoelectricity Semiconductor devices silicon nitride Strain Stress Stresses Threshold voltage Transistors Two dimensional electron gas (2DEG) Wide band gap semiconductors |
Title | Local 2DEG Density Control in Heterostructures of Piezoelectric Materials and Its Application in GaN HEMT Fabrication Technology |
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