Controlling of material analysers of the GD-OES type with help of pump-down curves - Klemm, Denis; Hoffmann, Volker; Edelmann, Christian (Vacuum, 2009)
Keywords: Chambers; Desorption; Devices; Emission analysis; Evaluation; Film thickness; GD-OES; GDOS; GDS; Glow discharges; Pump curves; Pumping; Purity; Spectrometers; Pump curves; GDOS; Evaluation; Desorption; GD-OES; GDS