Effects of spin coating parameters on stress, electrical and optical properties of multilayer ZnO thin film prepared by sol-gel

• Published in: Molecular Crystals and Liquid Crystals Vol. 709; no. 1; pp. 61 - 69
• Main Authors: Demircan, Gokhan, Gurses, Enes Furkan, Acikgoz, Abuzer, Yalcin, Serife, Aktas, Bulent
• Format: Journal Article
• Language: English
• Published: Philadelphia Taylor & Francis 21.09.2020; Taylor & Francis Ltd
• Subjects: Coating parameters; electrical conductivity; Film thickness; Fluorescence; Glass substrates; Multilayers; Optical properties; Parameters; Residual stress; sol-gel; Sol-gel processes; Spin coating; Thin films; Time measurement; Wurtzite; X-ray diffraction; Zinc oxide; Zinc oxides; ZnO thin film

In this study, zinc oxide (ZnO) thin films deposited on to glass substrates have been manufactured by sol-gel spin coating method at various spin speed and time. The effect of spin speed and time on film thickness, structural properties, and residual stress parameters has been investigated. Scanning...