Development of a Novel Parasitic-Type Piezoelectric Actuator

• Published in: IEEE/ASME transactions on mechatronics Vol. 22; no. 1; pp. 541 - 550
• Main Authors: Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Li, Ning, Zhang, Shizhong, Du, Yumeng
• Format: Journal Article
• Language: English
• Published: IEEE 01.02.2017
• Subjects: Actuator; Fasteners; flexure hinge; Force; Friction; Mathematical model; Nanopositioning; parasitic; piezoelectric; Piezoelectric actuators

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is...