Development of a Novel Parasitic-Type Piezoelectric Actuator

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is...

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Bibliographic Details
Published inIEEE/ASME transactions on mechatronics Vol. 22; no. 1; pp. 541 - 550
Main Authors Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Li, Ning, Zhang, Shizhong, Du, Yumeng
Format Journal Article
LanguageEnglish
Published IEEE 01.02.2017
Subjects
Actuator
Fasteners
flexure hinge
Force
Friction
Mathematical model
Nanopositioning
parasitic
piezoelectric
Piezoelectric actuators
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Summary:A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2016.2604242