Development of a Novel Parasitic-Type Piezoelectric Actuator

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is...

Full description

Saved in:
Bibliographic Details
Published inIEEE/ASME transactions on mechatronics Vol. 22; no. 1; pp. 541 - 550
Main Authors Li, Jianping, Zhou, Xiaoqin, Zhao, Hongwei, Shao, Mingkun, Li, Ning, Zhang, Shizhong, Du, Yumeng
Format Journal Article
LanguageEnglish
Published IEEE 01.02.2017
Subjects
Actuator
Fasteners
flexure hinge
Force
Friction
Mathematical model
Nanopositioning
parasitic
piezoelectric
Piezoelectric actuators
Online AccessGet full text

Cover

Abstract A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
AbstractList A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab/Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
Author Shizhong Zhang
Jianping Li
Hongwei Zhao
Yumeng Du
Ning Li
Mingkun Shao
Xiaoqin Zhou
Author_xml – sequence: 1
  givenname: Jianping
  surname: Li
  fullname: Li, Jianping
– sequence: 2
  givenname: Xiaoqin
  surname: Zhou
  fullname: Zhou, Xiaoqin
– sequence: 3
  givenname: Hongwei
  surname: Zhao
  fullname: Zhao, Hongwei
– sequence: 4
  givenname: Mingkun
  surname: Shao
  fullname: Shao, Mingkun
– sequence: 5
  givenname: Ning
  surname: Li
  fullname: Li, Ning
– sequence: 6
  givenname: Shizhong
  surname: Zhang
  fullname: Zhang, Shizhong
– sequence: 7
  givenname: Yumeng
  surname: Du
  fullname: Du, Yumeng
BookMark eNp9j81Kw0AUhQepYFt9Ad3kBVLv_CSTATelViv400UFd2FyewMjaaZMRqE-vaktLly4uocL3zl8IzZofUuMXXKYcA7mevU0ny0mAng-ETkoocQJG3KjeApcvQ36DIVMlZLZGRt13TsAKA58yG5u6ZMav91QGxNfJzZ59v0jWdpgOxcdpqvdlpKloy9PDWEMDpMpxg8bfThnp7VtOro43jF7vZuvZov08eX-YTZ9TFFKHdOK0KpKVDm3ViujBCJlhgOucxQq05Uu6jUKUxhV5UZbKSUIS2vUvZusQY6ZOPRi8F0XqC63wW1s2JUcyr1_-eNf7v3Lo38PFX8gdNFG59sYrGv-R68OqCOi3y2dZbnQhfwGZD1qnA
CODEN IATEFW
CitedBy_id crossref_primary_10_1007_s00542_018_04286_y
crossref_primary_10_1007_s00419_022_02133_1
crossref_primary_10_1016_j_ceramint_2024_02_371
crossref_primary_10_1109_TIE_2021_3073313
crossref_primary_10_1016_j_sna_2020_111907
crossref_primary_10_1109_TIE_2024_3360639
crossref_primary_10_1109_TIE_2018_2873123
crossref_primary_10_1088_1361_665X_ac58d4
crossref_primary_10_1016_j_sna_2019_06_025
crossref_primary_10_1016_j_sna_2024_115670
crossref_primary_10_1016_j_ymssp_2022_109618
crossref_primary_10_1007_s00419_021_02055_4
crossref_primary_10_1016_j_asr_2018_09_037
crossref_primary_10_1088_1361_665X_ac8b48
crossref_primary_10_3390_mi12020140
crossref_primary_10_1016_j_ijmecsci_2023_108496
crossref_primary_10_1088_1361_665X_ad8054
crossref_primary_10_1016_j_ymssp_2022_108999
crossref_primary_10_1088_1361_665X_ab545d
crossref_primary_10_1109_ACCESS_2018_2875940
crossref_primary_10_1016_j_sna_2021_112959
crossref_primary_10_1007_s00542_024_05722_y
crossref_primary_10_1088_1361_665X_ab1428
crossref_primary_10_1088_1361_665X_ab2ce9
crossref_primary_10_1088_1361_665X_abe33a
crossref_primary_10_1109_TIE_2021_3094477
crossref_primary_10_1016_j_sna_2019_04_006
crossref_primary_10_1016_j_jeurceramsoc_2019_12_063
crossref_primary_10_1109_ACCESS_2019_2947449
crossref_primary_10_1109_JMEMS_2024_3392402
crossref_primary_10_1109_TIE_2017_2677318
crossref_primary_10_1016_j_sna_2023_114761
crossref_primary_10_1088_1361_665X_ac7428
crossref_primary_10_1016_j_sna_2018_03_039
crossref_primary_10_3390_mi15030325
crossref_primary_10_1016_j_ymssp_2020_106881
crossref_primary_10_1088_1361_665X_ada506
crossref_primary_10_3390_app9245309
crossref_primary_10_1016_j_sna_2020_112229
crossref_primary_10_1016_j_mechmachtheory_2018_04_017
crossref_primary_10_1016_j_ymssp_2022_109317
crossref_primary_10_1016_j_precisioneng_2018_10_005
crossref_primary_10_1109_TMECH_2022_3218571
crossref_primary_10_1109_TMECH_2018_2865619
crossref_primary_10_3390_mi12020154
crossref_primary_10_1007_s11431_020_1676_7
crossref_primary_10_1088_1361_665X_ab4e07
crossref_primary_10_1109_ACCESS_2018_2842747
crossref_primary_10_1109_TMECH_2020_3031258
crossref_primary_10_1177_1045389X241230570
crossref_primary_10_3233_JAE_170074
crossref_primary_10_1088_1361_665X_ac736e
crossref_primary_10_1177_1045389X231157365
crossref_primary_10_1177_02783649211002545
crossref_primary_10_1016_j_ymssp_2019_106254
crossref_primary_10_1016_j_mechmachtheory_2021_104511
crossref_primary_10_1088_1361_665X_acbd03
crossref_primary_10_1088_1361_665X_ab0eb9
crossref_primary_10_1109_ACCESS_2019_2898262
crossref_primary_10_1016_j_ymssp_2020_107079
crossref_primary_10_1177_1045389X19862376
crossref_primary_10_1016_j_ymssp_2019_01_033
crossref_primary_10_1007_s41315_021_00220_0
crossref_primary_10_1016_j_mechmachtheory_2023_105336
crossref_primary_10_1088_1361_665X_ac09a0
crossref_primary_10_1016_j_sna_2024_115871
crossref_primary_10_1080_00150193_2023_2189828
crossref_primary_10_1109_ACCESS_2019_2900381
crossref_primary_10_1016_j_ymssp_2019_06_026
crossref_primary_10_1088_1361_665X_ac36b1
crossref_primary_10_1109_TMECH_2018_2854791
crossref_primary_10_1109_TIE_2022_3213910
crossref_primary_10_1109_TIE_2023_3292876
crossref_primary_10_1109_TUFFC_2019_2951158
crossref_primary_10_1016_j_sna_2019_111808
crossref_primary_10_1016_j_ymssp_2022_109494
crossref_primary_10_1109_TIE_2019_2916295
crossref_primary_10_1109_TASE_2024_3417828
crossref_primary_10_1016_j_ymssp_2019_106424
crossref_primary_10_1016_j_precisioneng_2023_09_012
crossref_primary_10_1109_TMECH_2020_2965962
crossref_primary_10_1080_00150193_2022_2102823
crossref_primary_10_1109_TIE_2021_3065619
crossref_primary_10_1016_j_sna_2024_115124
crossref_primary_10_1109_TIE_2023_3342313
crossref_primary_10_1016_j_ijmecsci_2024_109850
crossref_primary_10_1088_1361_665X_ac0399
crossref_primary_10_1016_j_sna_2019_07_013
crossref_primary_10_1109_TMECH_2022_3151102
crossref_primary_10_1016_j_ymssp_2020_106964
crossref_primary_10_3390_mi10120863
crossref_primary_10_1109_JSEN_2020_3039052
crossref_primary_10_1109_TMECH_2018_2794379
crossref_primary_10_1177_1045389X221115705
crossref_primary_10_1016_j_ymssp_2021_108741
crossref_primary_10_1007_s42341_019_00134_6
crossref_primary_10_1177_1045389X211072244
crossref_primary_10_1109_TMECH_2021_3125825
crossref_primary_10_3390_ma16062272
crossref_primary_10_1109_TIE_2021_3135617
crossref_primary_10_1109_ACCESS_2020_3037827
crossref_primary_10_1016_j_euromechsol_2022_104619
crossref_primary_10_1016_j_flowmeasinst_2024_102723
crossref_primary_10_1016_j_sna_2020_111971
crossref_primary_10_1016_j_mechatronics_2023_103065
crossref_primary_10_1016_j_precisioneng_2021_05_005
crossref_primary_10_1088_1361_665X_ad9201
crossref_primary_10_3390_s23187795
crossref_primary_10_1088_1361_665X_aca18a
crossref_primary_10_1109_TMECH_2024_3375529
crossref_primary_10_1016_j_ymssp_2019_106360
crossref_primary_10_1109_TMECH_2020_2972273
crossref_primary_10_1049_mnl_2018_5684
crossref_primary_10_1088_1361_665X_ab292a
crossref_primary_10_1007_s42235_022_00313_x
crossref_primary_10_1016_j_ymssp_2021_108636
crossref_primary_10_1088_1361_665X_ab547f
crossref_primary_10_1109_TMECH_2019_2890825
crossref_primary_10_1016_j_ymssp_2022_109752
crossref_primary_10_1109_TIE_2018_2868274
crossref_primary_10_1109_TIE_2024_3355497
crossref_primary_10_1109_ACCESS_2017_2744498
crossref_primary_10_1016_j_precisioneng_2022_02_007
crossref_primary_10_3390_s24113625
crossref_primary_10_1080_19475411_2024_2395293
Cites_doi 10.1109/20.278818
10.1063/1.1149794
10.1016/j.sna.2005.12.028
10.1109/TMECH.2010.2056694
10.1063/1.2756627
10.1109/20.753821
10.1007/s00170-011-3827-z
10.1115/1.1480022
10.1109/TMECH.2014.2368789
10.1016/j.mechmachtheory.2010.09.007
10.1109/9.376053
10.1007/s00170-011-3556-3
10.1016/j.rcim.2014.10.003
10.1109/20.753819
10.1016/j.mechatronics.2007.07.010
10.1109/TMECH.2014.2360644
10.1016/j.sna.2013.02.020
10.1109/TCST.2010.2040282
10.1109/TASE.2012.2198918
10.1063/1.1494855
10.1007/s00542-001-0146-6
10.1016/j.jsv.2007.03.074
10.1016/j.precisioneng.2012.11.004
10.1109/TMECH.2010.2043849
10.1109/ICMA.2011.5985726
10.1109/RAMECH.2006.252649
10.1109/TMECH.2010.2052107
ContentType Journal Article
DBID 97E
RIA
RIE
AAYXX
CITATION
DOI 10.1109/TMECH.2016.2604242
DatabaseName IEEE All-Society Periodicals Package (ASPP) 2005-present
IEEE All-Society Periodicals Package (ASPP) 1998-Present
IEEE Electronic Library (IEL)
CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
Database_xml – sequence: 1
  dbid: RIE
  name: IEEE Electronic Library (IEL)
  url: https://proxy.k.utb.cz/login?url=https://ieeexplore.ieee.org/
  sourceTypes: Publisher
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1941-014X
EndPage 550
ExternalDocumentID 10_1109_TMECH_2016_2604242
7556278
Genre orig-research
GrantInformation_xml – fundername: National Natural Science Foundation of China
  grantid: 51275198; 51105163
  funderid: 10.13039/501100001809
– fundername: National Hi-tech Research and Development Program of China 863 Program
  grantid: 2012AA041206
– fundername: Patent Demonstration Project for Research Team in Jilin Province
  grantid: 20130416015ZG
– fundername: Program for New Century Excellent Talents in University of Ministry of Education of China
  grantid: NCET-12-0238
  funderid: 10.13039/501100004602
– fundername: Specialized Research Fund for the Doctoral Program of Higher Education
  grantid: 20130061110026
– fundername: Special Projects for Development of National Major Scientific Instruments and Equipments
  grantid: 2012YQ030075
GroupedDBID -~X
0R~
29I
4.4
5GY
5VS
6IK
97E
9M8
AAJGR
AARMG
AASAJ
AAWTH
ABAZT
ABQJQ
ABVLG
ACGFS
ACIWK
ACKIV
AETIX
AGQYO
AGSQL
AHBIQ
AI.
AIBXA
AKJIK
AKQYR
ALLEH
ALMA_UNASSIGNED_HOLDINGS
ATWAV
BEFXN
BFFAM
BGNUA
BKEBE
BPEOZ
CS3
EBS
EJD
F5P
H~9
IFIPE
IFJZH
IPLJI
JAVBF
LAI
M43
OCL
RIA
RIE
RNS
TN5
VH1
AAYXX
CITATION
RIG
ID FETCH-LOGICAL-c337t-beca4b2b61aa74942cce5910cd6c2457b78fdc29894b697a33302aedc71103f03
IEDL.DBID RIE
ISSN 1083-4435
IngestDate Tue Jul 01 04:23:13 EDT 2025
Thu Apr 24 23:11:46 EDT 2025
Tue Aug 26 16:43:23 EDT 2025
IsPeerReviewed true
IsScholarly true
Issue 1
Language English
License https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c337t-beca4b2b61aa74942cce5910cd6c2457b78fdc29894b697a33302aedc71103f03
PageCount 10
ParticipantIDs crossref_primary_10_1109_TMECH_2016_2604242
ieee_primary_7556278
crossref_citationtrail_10_1109_TMECH_2016_2604242
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2017-02-01
PublicationDateYYYYMMDD 2017-02-01
PublicationDate_xml – month: 02
  year: 2017
  text: 2017-02-01
  day: 01
PublicationDecade 2010
PublicationTitle IEEE/ASME transactions on mechatronics
PublicationTitleAbbrev TMECH
PublicationYear 2017
Publisher IEEE
Publisher_xml – name: IEEE
References ref13
ref12
ref15
ref14
ref11
ref10
ref2
ref1
ref16
ref19
ref18
ref24
ref26
li (ref17) 2011; 6
ref25
ref20
ref22
ref21
ref28
ref27
ref29
ref8
kwon (ref23) 0
ref7
ref9
ref4
ref3
ref6
ref5
References_xml – ident: ref16
  doi: 10.1109/20.278818
– ident: ref12
  doi: 10.1063/1.1149794
– ident: ref27
  doi: 10.1016/j.sna.2005.12.028
– ident: ref19
  doi: 10.1109/TMECH.2010.2056694
– ident: ref7
  doi: 10.1063/1.2756627
– ident: ref21
  doi: 10.1109/20.753821
– ident: ref14
  doi: 10.1007/s00170-011-3827-z
– ident: ref25
  doi: 10.1115/1.1480022
– ident: ref2
  doi: 10.1109/TMECH.2014.2368789
– ident: ref1
  doi: 10.1016/j.mechmachtheory.2010.09.007
– ident: ref29
  doi: 10.1109/9.376053
– ident: ref20
  doi: 10.1007/s00170-011-3556-3
– ident: ref5
  doi: 10.1016/j.rcim.2014.10.003
– ident: ref18
  doi: 10.1109/20.753819
– ident: ref10
  doi: 10.1016/j.mechatronics.2007.07.010
– ident: ref9
  doi: 10.1109/TMECH.2014.2360644
– volume: 6
  start-page: 111
  year: 2011
  ident: ref17
  article-title: Mechatronics of electrostatic microactuators for computer disk drive dual-stage servo systems
  publication-title: IEEE/ASME Trans Mechatronics
– ident: ref8
  doi: 10.1016/j.sna.2013.02.020
– ident: ref6
  doi: 10.1109/TCST.2010.2040282
– ident: ref22
  doi: 10.1109/TASE.2012.2198918
– start-page: 120
  year: 0
  ident: ref23
  article-title: On the coarse/fine dual-platform manipulators with robust perturbation compensator
  publication-title: Proc 2001 IEEE Int Conf Robot Autom
– ident: ref26
  doi: 10.1063/1.1494855
– ident: ref15
  doi: 10.1007/s00542-001-0146-6
– ident: ref11
  doi: 10.1016/j.jsv.2007.03.074
– ident: ref3
  doi: 10.1016/j.precisioneng.2012.11.004
– ident: ref13
  doi: 10.1109/TMECH.2010.2043849
– ident: ref28
  doi: 10.1109/ICMA.2011.5985726
– ident: ref24
  doi: 10.1109/RAMECH.2006.252649
– ident: ref4
  doi: 10.1109/TMECH.2010.2052107
SSID ssj0004101
Score 2.5385492
Snippet A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse...
SourceID crossref
ieee
SourceType Enrichment Source
Index Database
Publisher
StartPage 541
SubjectTerms Actuator
Fasteners
flexure hinge
Force
Friction
Mathematical model
Nanopositioning
parasitic
piezoelectric
Piezoelectric actuators
Title Development of a Novel Parasitic-Type Piezoelectric Actuator
URI https://ieeexplore.ieee.org/document/7556278
Volume 22
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV3Pa8IwFA7qaTvslxtzv-hht621TdKkgV1EFBkoHhS8lZc0BdmwQ-rFv35JWp0bY-xWQhrCeynve-n3vYfQIxOg85wmPo_j2KcEsPmktMlSQJpwE2OaSCtwHk_YaE5fF_GigZ73WhittSOf6cA-un_5WaE29qqsa9ZjmCdN1DSJW6XV-tJARq7VcWQghU8NBtgJZELRnY0H_ZFlcbHAoHeKKf4WhA66qrigMjxF4912Ki7JW7ApZaC2Pyo1_ne_Z-ikRpderzoO56ihVxfo-KDmYBu9HNCEvCL3wJsUZsCbwhosf0v5NjX1pku9LaoeOUvl9azMxGTnl2g-HMz6I79uoeArQnjpGw8BlViyCIBTQbGysqsoVBlTmMZc8iTPlKvCLpngQAgJMehMcWM5kofkCrVWxUpfIw94AgZcSUWFiXwqAiYJExrjXAAGrjoo2tk0VXV9cdvm4j11eUYoUueH1Pohrf3QQU_7dz6q6hp_zm5bG-9n1ua9-X34Fh1hG4Idw_oOtcr1Rt8bAFHKB3dyPgHugcAs
linkProvider IEEE
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV3PT8IwFH5BPKgHf6ERf-7gTTe2tmu3xAshEFRGOEDCbWlLlxANMwQu_PW23UA0xnhbmq5p3uvyvdd933sA9zTmKstI5LIwDF2COdKflNJZChcabkJEImEEzkmfdkfkZRyOK_C40cIopSz5THnm0f7Ln-Ryaa7KGno9ili0A7sa98OgUGt9qSAD2-w40EGFS3QUsJbI-HFjmLRbXcPjop6O3wki6BsMbfVVsbDSOYJkvaGCTfLmLRfCk6sftRr_u-NjOCzjS6dZHIgTqKjZKRxsVR2swdMWUcjJM4c7_VwPOAM-54bBJV2TnDqDqVrlRZecqXSaRmii8_MzGHXaw1bXLZsouBJjtnC1jzgRSNCAc0ZigqQRXgW-nFCJSMgEi7KJtHXYBY0Zxxj7iKuJZNpyOPPxOVRn-UxdgMNZxHV4JSSJNfbJgFOBaawQymKOOJN1CNY2TWVZYdw0unhPbabhx6n1Q2r8kJZ-qMPD5p2Por7Gn7NrxsabmaV5L38fvoO97jDppb3n_usV7CMDyJZvfQ3VxXypbnQ4sRC39hR9AiV2w3U
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Development+of+a+Novel+Parasitic-Type+Piezoelectric+Actuator&rft.jtitle=IEEE%2FASME+transactions+on+mechatronics&rft.au=Li%2C+Jianping&rft.au=Zhou%2C+Xiaoqin&rft.au=Zhao%2C+Hongwei&rft.au=Shao%2C+Mingkun&rft.date=2017-02-01&rft.issn=1083-4435&rft.eissn=1941-014X&rft.volume=22&rft.issue=1&rft.spage=541&rft.epage=550&rft_id=info:doi/10.1109%2FTMECH.2016.2604242&rft.externalDBID=n%2Fa&rft.externalDocID=10_1109_TMECH_2016_2604242
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1083-4435&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1083-4435&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1083-4435&client=summon