Resistive switching characteristics of sol-gel derived La2Zr2O7 thin film for RRAM applications - Tseng, Hsiao-Ting; Hsu, Tsung-Hsien; Tsai, Meng-Hung; Huang, Chi-Yuen; Huang, Cheng-Liang (Journal of alloys and compounds, 2022)
Keywords: Aluminum; Amorphous; Annealing; Cycle time; Film thickness; High resistance; La2Zr2O7; Low resistance; RRAM; Sol-gel; Sol-gel processes; Spin coating; Switching; Thermal stress; Thin films; Titanium; Work functions; Amorphous; RRAM; La2Zr2O7; Sol-gel