Resistive switching characteristics and mechanism of lanthanum yttrium oxide (LaYO3) films deposited by RF sputtering for RRAM applications - Cheng, Chiou-Ru; Tsai, Meng-Hung; Hsu, Tsung-Hsien; Li, Ming-Jen; Huang, Cheng-Liang (Journal of alloys and compounds, 2023)
Keywords: Annealing; Deposition; Electrode materials; Electrodes; Filaments; Indium tin oxides; Lanthanum; LaYO3; Post-metal anneal; RRAM; Schottky emission; Sputtering; Substrates; Switching; Thin films; Yttrium oxide; RRAM; Post-metal anneal; LaYO3; Schottky emission