Silicon nitride chemical vapor deposition from dichlorosilane and ammonia: theoretical study of surface structures and reaction mechanism - Bagatur'yants, Alexander A.; Novoselov, Konstantin P.; Safonov, Andrei A.; Vernon Cole, J.; Stoker, Matthew; Korkin, Anatoli A. (Surface science, 2001)
Keywords: Ab initio quantum chemical methods and calculations; Chemical vapor deposition modeling; Clusters; Models of surface chemical reactions; Models of surface kinetics; Silicon nitride; Surface chemical reaction; Silicon nitride; Clusters; Ab initio quantum chemical methods and calculations; Surface chemical reaction; Models of surface kinetics; Models of surface chemical reactions; Chemical vapor deposition modeling