3D Ultrasonic Rangefinder on a Chip

An ultrasonic 3D rangefinder uses an array of AlN MEMS transducers and custom readout electronics to localize targets over a ±45° field of view up to 1 m away. The rms position error at 0.5 m range is 0.4 mm, 0.2 °, and 0.8 ° for the range, x-angle, and y-angle axes, respectively. The 0.18 μm CMOS A...

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Bibliographic Details
Published inIEEE journal of solid-state circuits Vol. 50; no. 1; pp. 320 - 334
Main Authors Przybyla, Richard J., Hao-Yen Tang, Guedes, Andre, Shelton, Stefon E., Horsley, David A., Boser, Bernhard E.
Format Journal Article
LanguageEnglish
Published IEEE 01.01.2015
Subjects
3D rangefinding
Acoustics
Arrays
Bandpass ADCs
CMOS
depth sensing
MEMS
micromachined ultrasound transducers
Noise
rangefinding
Receivers
Three-dimensional displays
Transducers
Ultrasonic imaging
ultrasound
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Summary:An ultrasonic 3D rangefinder uses an array of AlN MEMS transducers and custom readout electronics to localize targets over a ±45° field of view up to 1 m away. The rms position error at 0.5 m range is 0.4 mm, 0.2 °, and 0.8 ° for the range, x-angle, and y-angle axes, respectively. The 0.18 μm CMOS ASIC comprises 10 independent channels with separate high voltage transmitters, readout amplifiers, and switched-capacitor bandpass ΣΔ ADCs with built-in continuous time anti-alias filtering. For a 1 m maximum range, power dissipation is 400 μW at 30 fps. For a 0.3 m maximum range, the power dissipation scales to 5 μW/ch at 10 fps.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2014.2364975