Influence of Solvents in HF Solutions on Anodic Formation of Mesoporous Silicon, Revealed by the Characterization of Mesoporous Silicon Rugate Filters

• Published in: ECS journal of solid state science and technology Vol. 5; no. 5; pp. P250 - P255
• Main Authors: Urata, Tomoko, Fukami, Kazuhiro, Takeda, Naoto, Sakka, Tetsuo, Ogata, Yukio H.
• Format: Journal Article
• Language: English
• Published: The Electrochemical Society 01.01.2016

Formation mechanism of mesoporous silicon by electrochemical dissolution is studied. HF solutions containing a high amount of alcohol were often used for the preparation of mesoporous silicon. The present study focuses the role of alcohol in the HF electrolyte solutions during the anodic formation o...