Depla, D. (2024). The measurement and impact of negative oxygen ions during reactive sputter deposition. Critical reviews in solid state and materials sciences, 49(4), 718-753. https://doi.org/10.1080/10408436.2023.2258159
Chicago Style (17th ed.) CitationDepla, D. "The Measurement and Impact of Negative Oxygen Ions During Reactive Sputter Deposition." Critical Reviews in Solid State and Materials Sciences 49, no. 4 (2024): 718-753. https://doi.org/10.1080/10408436.2023.2258159.
MLA (9th ed.) CitationDepla, D. "The Measurement and Impact of Negative Oxygen Ions During Reactive Sputter Deposition." Critical Reviews in Solid State and Materials Sciences, vol. 49, no. 4, 2024, pp. 718-753, https://doi.org/10.1080/10408436.2023.2258159.
Warning: These citations may not always be 100% accurate.