Parameter optimization of microcantilevers optically excited by a semiconductor laser with optical feedback
A novel approach of optically exciting and detecting the vibration of a microcantilever by a sinusoidally driven semiconductor laser subject to optical feedback is proposed. A theoretical model for the approach is established, and the working parameters are optimized. In our experiments, an Al-coate...
Saved in:
Published in | Optik (Stuttgart) Vol. 120; no. 13; pp. 676 - 682 |
---|---|
Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Reutlingen
Elsevier GmbH
01.08.2009
Elsevier |
Subjects | |
Online Access | Get full text |
ISSN | 0030-4026 1618-1336 |
DOI | 10.1016/j.ijleo.2008.02.019 |
Cover
Loading…
Abstract | A novel approach of optically exciting and detecting the vibration of a microcantilever by a sinusoidally driven semiconductor laser subject to optical feedback is proposed. A theoretical model for the approach is established, and the working parameters are optimized. In our experiments, an Al-coated microcantilever is designed with the optimized working parameters, and the microcantilever is optically excited by a sinusoidally driven semiconductor laser. We have demonstrated that there exist periodic dips of the optical power of the semiconductor laser, which is caused by the resonant vibration of the microcantilever. The optical power of the semiconductor laser is also analyzed theoretically by using the Lang–Kobayashi (L–K) equations. The experimental result is consistent with the result of theoretical analysis. |
---|---|
AbstractList | A novel approach of optically exciting and detecting the vibration of a microcantilever by a sinusoidally driven semiconductor laser subject to optical feedback is proposed. A theoretical model for the approach is established, and the working parameters are optimized. In our experiments, an Al-coated microcantilever is designed with the optimized working parameters, and the microcantilever is optically excited by a sinusoidally driven semiconductor laser. We have demonstrated that there exist periodic dips of the optical power of the semiconductor laser, which is caused by the resonant vibration of the microcantilever. The optical power of the semiconductor laser is also analyzed theoretically by using the Lang–Kobayashi (L–K) equations. The experimental result is consistent with the result of theoretical analysis. |
Author | Liu, Yingming Wang, Xiangzhao Wang, Shaoqing Huang, Bingjie |
Author_xml | – sequence: 1 givenname: Shaoqing surname: Wang fullname: Wang, Shaoqing email: wangsq@siom.ac.cn organization: Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China – sequence: 2 givenname: Xiangzhao surname: Wang fullname: Wang, Xiangzhao organization: Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China – sequence: 3 givenname: Yingming surname: Liu fullname: Liu, Yingming organization: Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China – sequence: 4 givenname: Bingjie surname: Huang fullname: Huang, Bingjie organization: Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China |
BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=21804179$$DView record in Pascal Francis |
BookMark | eNqFkLtOwzAUQC0EEuXxBSxeGBOu7SROBgZU8ZIqwQCz5To3wmkaV7Z5lK_HtMDAAIvvcs617jkgu6MbkZATBjkDVp31ue0HdDkHqHPgObBmh0xYxeqMCVHtkgmAgKwAXu2TgxB6AJAS5IQs7rXXS4zoqVtFu7TvOlo3UtfRpTXeGT1GO-AL-rABjB6GNcU3YyO2dL6mmgZMpBvbZxOdp4MOaderjU_fPO0Q27k2iyOy1-kh4PHXPCSPV5cP05tsdnd9O72YZUYIEbOmLkrOsDVVerVppZC6BEDNJS9BNLIyvGSFMHVRlFVbSCyxwxoYVIVoTCkOyel270qH9H_n9WhsUCtvl9qvFWc1FEw2iRNbLt0ZgsfuB2GgPruqXm26qs-uCrhKXZPV_LJSi0206LUd_nHPty6m818sehWMxdFgaz2aqFpn__Q_AEQEmJA |
CODEN | OTIKAJ |
CitedBy_id | crossref_primary_10_1049_mnl_2013_0352 |
Cites_doi | 10.1049/el:19890108 10.1016/0924-4247(93)80211-X 10.1016/0143-8166(92)90004-Q 10.1103/PhysRevB.69.045403 10.1063/1.2205409 10.1038/nature05741 10.1016/0924-4247(90)85078-I 10.1016/0924-4247(96)80130-0 10.1063/1.1150690 10.1109/JQE.1980.1070479 |
ContentType | Journal Article |
Copyright | 2008 Elsevier GmbH 2009 INIST-CNRS |
Copyright_xml | – notice: 2008 Elsevier GmbH – notice: 2009 INIST-CNRS |
DBID | AAYXX CITATION IQODW |
DOI | 10.1016/j.ijleo.2008.02.019 |
DatabaseName | CrossRef Pascal-Francis |
DatabaseTitle | CrossRef |
DatabaseTitleList | |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Physics |
EISSN | 1618-1336 |
EndPage | 682 |
ExternalDocumentID | 21804179 10_1016_j_ijleo_2008_02_019 S0030402608000454 |
GroupedDBID | --K --M -~X .~1 0R~ 123 1B1 1RT 1~. 1~5 29N 4.4 457 4G. 53G 5VS 7-5 71M 8P~ AABNK AACTN AAEDT AAEDW AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO ABEFU ABFNM ABLJU ABMAC ABNEU ABTAH ABXDB ABYKQ ACDAQ ACFVG ACGFS ACNNM ACRLP ADBBV ADEZE ADMUD ADTZH AEBSH AECPX AEKER AENEX AFKWA AFTJW AGHFR AGUBO AGYEJ AHJVU AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BJAXD BKOJK BLXMC CAG COF CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-Q G8K GBLVA HVGLF HZ~ IHE J1W JJJVA KOM M41 MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SES SEW SPC SPCBC SPD SSQ SST SSZ T5K TN5 VOH XOL ZY4 ~02 ~G- AATTM AAXKI AAYWO AAYXX ABDPE ABJNI ABWVN ACRPL ACVFH ADCNI ADNMO AEIPS AEUPX AFJKZ AFPUW AFXIZ AGCQF AGQPQ AGRNS AIGII AIIUN AKBMS AKRWK AKYEP ANKPU APXCP BNPGV CITATION SSH EFKBS IQODW |
ID | FETCH-LOGICAL-c333t-984521edc621eacd737a500ea272503976c25143c84456d47e5efe80106439c53 |
IEDL.DBID | AIKHN |
ISSN | 0030-4026 |
IngestDate | Mon Jul 21 09:13:55 EDT 2025 Tue Jul 01 03:34:21 EDT 2025 Thu Apr 24 22:50:24 EDT 2025 Fri Feb 23 02:15:21 EST 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 13 |
Keywords | Optical feedback Parameter optimization Optical excitation Microcantilever Semiconductor laser Semiconductor lasers Lang-Kobayashi equations Optimization method Theoretical study |
Language | English |
License | https://www.elsevier.com/tdm/userlicense/1.0 CC BY 4.0 |
LinkModel | DirectLink |
MergedId | FETCHMERGED-LOGICAL-c333t-984521edc621eacd737a500ea272503976c25143c84456d47e5efe80106439c53 |
PageCount | 7 |
ParticipantIDs | pascalfrancis_primary_21804179 crossref_primary_10_1016_j_ijleo_2008_02_019 crossref_citationtrail_10_1016_j_ijleo_2008_02_019 elsevier_sciencedirect_doi_10_1016_j_ijleo_2008_02_019 |
ProviderPackageCode | CITATION AAYXX |
PublicationCentury | 2000 |
PublicationDate | 2009-08-00 |
PublicationDateYYYYMMDD | 2009-08-01 |
PublicationDate_xml | – month: 08 year: 2009 text: 2009-08-00 |
PublicationDecade | 2000 |
PublicationPlace | Reutlingen |
PublicationPlace_xml | – name: Reutlingen |
PublicationTitle | Optik (Stuttgart) |
PublicationYear | 2009 |
Publisher | Elsevier GmbH Elsevier |
Publisher_xml | – name: Elsevier GmbH – name: Elsevier |
References | Zhang, Uttamchandani, Culshaw (bib7) 1989; 25 Bass (bib10) 1994; vol. 2 Burg (bib4) 2007; 446 Zhang, Uttamchandani, Culshaw (bib8) 1990; 21 Lavrik, Datskos (bib3) 2005; 14 Churenkov (bib12) 1993; 39 Gysin (bib1) 2004; 69 Liu, Wang, Wang (bib9) 2006; 4 Welham (bib2) 1996; 52 Kaye, Laby (bib11) 1995 Ramos (bib6) 2006; 99 Uttamchandani, Li, Zhang, Culshaw (bib5) 1992 Sandberg (bib13) 2000; 71 Lang, Kobayashi (bib14) 1980; 16 Lang (10.1016/j.ijleo.2008.02.019_bib14) 1980; 16 Gysin (10.1016/j.ijleo.2008.02.019_bib1) 2004; 69 Lavrik (10.1016/j.ijleo.2008.02.019_bib3) 2005; 14 Sandberg (10.1016/j.ijleo.2008.02.019_bib13) 2000; 71 Ramos (10.1016/j.ijleo.2008.02.019_bib6) 2006; 99 Kaye (10.1016/j.ijleo.2008.02.019_bib11) 1995 Zhang (10.1016/j.ijleo.2008.02.019_bib8) 1990; 21 Bass (10.1016/j.ijleo.2008.02.019_bib10) 1994; vol. 2 Liu (10.1016/j.ijleo.2008.02.019_bib9) 2006; 4 Uttamchandani (10.1016/j.ijleo.2008.02.019_bib5) 1992 Zhang (10.1016/j.ijleo.2008.02.019_bib7) 1989; 25 Welham (10.1016/j.ijleo.2008.02.019_bib2) 1996; 52 Burg (10.1016/j.ijleo.2008.02.019_bib4) 2007; 446 Churenkov (10.1016/j.ijleo.2008.02.019_bib12) 1993; 39 |
References_xml | – start-page: 119 year: 1992 end-page: 126 ident: bib5 article-title: All-fibre optical system for exciting and detecting the vibration of silicon microresonator sensors publication-title: Opt. Laser Eng. – volume: 446 start-page: 1066 year: 2007 end-page: 1069 ident: bib4 article-title: Weighing of biomolecules, single cells and single nanoparticles in fluid publication-title: Nature – volume: 21 start-page: 391 year: 1990 end-page: 393 ident: bib8 article-title: Excitation of silicon microresonators using short optical pulse publication-title: Sensors Actuators A – volume: 71 start-page: 2772 year: 2000 end-page: 2775 ident: bib13 article-title: Dynamics of damped cantilevers publication-title: Rev. Sci. Instrum. – volume: 25 start-page: 149 year: 1989 end-page: 150 ident: bib7 article-title: Transient excitation of silicon microresonator publication-title: Electron. Lett. – volume: 69 start-page: 045403 year: 2004 ident: bib1 article-title: Temperature dependence of the force sensitivity of silicon cantilevers publication-title: Phys. Rev. B. – volume: 99 start-page: 124904 year: 2006 ident: bib6 article-title: Photothermal excitation of microcantilevers in liquids publication-title: J. Appl. Phys. – volume: 52 start-page: 86 year: 1996 end-page: 91 ident: bib2 article-title: A laterally driven micromachined resonant pressure sensor publication-title: Sensors Actuators A – volume: 4 start-page: 309 year: 2006 end-page: 310 ident: bib9 article-title: Study on silicon micro-resonators by using a novel optical excitation and detection apparatus publication-title: Chin. Opt. Lett. – volume: vol. 2 year: 1994 ident: bib10 publication-title: Handbook of Optics – year: 1995 ident: bib11 article-title: Tables of Physical and Chemical Constants – volume: 16 start-page: 347 year: 1980 end-page: 355 ident: bib14 article-title: External optical feedback effects on semiconductor injection laser properties publication-title: IEEE J. Quantum. Electron. – volume: 14 start-page: 699 year: 2005 end-page: 706 ident: bib3 article-title: Femtogram mass detection using photothermally actuated nanomechanical resonators publication-title: Appl. Phys. Lett. – volume: 39 start-page: 141 year: 1993 end-page: 148 ident: bib12 article-title: Photothermal excitation and self-excitation of silicon microresonators publication-title: Sensors Actuators A – volume: vol. 2 year: 1994 ident: 10.1016/j.ijleo.2008.02.019_bib10 – year: 1995 ident: 10.1016/j.ijleo.2008.02.019_bib11 – volume: 25 start-page: 149 year: 1989 ident: 10.1016/j.ijleo.2008.02.019_bib7 article-title: Transient excitation of silicon microresonator publication-title: Electron. Lett. doi: 10.1049/el:19890108 – volume: 4 start-page: 309 year: 2006 ident: 10.1016/j.ijleo.2008.02.019_bib9 article-title: Study on silicon micro-resonators by using a novel optical excitation and detection apparatus publication-title: Chin. Opt. Lett. – volume: 39 start-page: 141 year: 1993 ident: 10.1016/j.ijleo.2008.02.019_bib12 article-title: Photothermal excitation and self-excitation of silicon microresonators publication-title: Sensors Actuators A doi: 10.1016/0924-4247(93)80211-X – start-page: 119 year: 1992 ident: 10.1016/j.ijleo.2008.02.019_bib5 article-title: All-fibre optical system for exciting and detecting the vibration of silicon microresonator sensors publication-title: Opt. Laser Eng. doi: 10.1016/0143-8166(92)90004-Q – volume: 14 start-page: 699 year: 2005 ident: 10.1016/j.ijleo.2008.02.019_bib3 article-title: Femtogram mass detection using photothermally actuated nanomechanical resonators publication-title: Appl. Phys. Lett. – volume: 69 start-page: 045403 year: 2004 ident: 10.1016/j.ijleo.2008.02.019_bib1 article-title: Temperature dependence of the force sensitivity of silicon cantilevers publication-title: Phys. Rev. B. doi: 10.1103/PhysRevB.69.045403 – volume: 99 start-page: 124904 year: 2006 ident: 10.1016/j.ijleo.2008.02.019_bib6 article-title: Photothermal excitation of microcantilevers in liquids publication-title: J. Appl. Phys. doi: 10.1063/1.2205409 – volume: 446 start-page: 1066 year: 2007 ident: 10.1016/j.ijleo.2008.02.019_bib4 article-title: Weighing of biomolecules, single cells and single nanoparticles in fluid publication-title: Nature doi: 10.1038/nature05741 – volume: 21 start-page: 391 year: 1990 ident: 10.1016/j.ijleo.2008.02.019_bib8 article-title: Excitation of silicon microresonators using short optical pulse publication-title: Sensors Actuators A doi: 10.1016/0924-4247(90)85078-I – volume: 52 start-page: 86 year: 1996 ident: 10.1016/j.ijleo.2008.02.019_bib2 article-title: A laterally driven micromachined resonant pressure sensor publication-title: Sensors Actuators A doi: 10.1016/0924-4247(96)80130-0 – volume: 71 start-page: 2772 year: 2000 ident: 10.1016/j.ijleo.2008.02.019_bib13 article-title: Dynamics of damped cantilevers publication-title: Rev. Sci. Instrum. doi: 10.1063/1.1150690 – volume: 16 start-page: 347 year: 1980 ident: 10.1016/j.ijleo.2008.02.019_bib14 article-title: External optical feedback effects on semiconductor injection laser properties publication-title: IEEE J. Quantum. Electron. doi: 10.1109/JQE.1980.1070479 |
SSID | ssj0007707 |
Score | 1.7894777 |
Snippet | A novel approach of optically exciting and detecting the vibration of a microcantilever by a sinusoidally driven semiconductor laser subject to optical... |
SourceID | pascalfrancis crossref elsevier |
SourceType | Index Database Enrichment Source Publisher |
StartPage | 676 |
SubjectTerms | Atomic and molecular physics Dynamical laser instabilities; noisy laser behavior Exact sciences and technology Fundamental areas of phenomenology (including applications) Laser optical systems: design and operation Lasers Microcantilever Molecular properties and interactions with photons Optical excitation Optical feedback Optics Parameter optimization Physics Properties of molecules and molecular ions Rotation, vibration and vibration-rotation constants Semiconductor laser Semiconductor lasers; laser diodes |
Title | Parameter optimization of microcantilevers optically excited by a semiconductor laser with optical feedback |
URI | https://dx.doi.org/10.1016/j.ijleo.2008.02.019 |
Volume | 120 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEB76QBBEfGJ9lD14NLbN5rE5lmKpisWDhd7CZrOBPlPaCvbib3cm2RQL0oOXHMLsJswu832bfDMDcB8RrDd5bLV0LC0HMckKJMe97EqJgBbHzSwX5q3v9QbOy9AdlqBT5MKQrNLE_jymZ9Ha3GkYbzYWoxHl-OJRnEpiiYyYOGWo2jzwRAWq7efXXn8bkH0_z5pGezoueUXxoUzmNRpP8yRAkdXupIo7fwPU0UKu0G1J3u_iFwh1T-DYsEfWzl_wFEp6fgYHmYpTrc5h8i5Ja4WuYimGgpnJsWRpwmYkvCM3YhQgJUZmgA-abpj-UsQ7WbRhkq1ILJ_OqQpsumRIrXEu-lZb2LME4S6SanIBg-7TR6dnmW4KluKcr61AOAjVOlYeXqWKfe5TNwQtbR9pENESZRN7UsJBUhU7vnZ1ogWdGZG0KJdfQmWezvUVMKRAiRs4ifaE56igJZRIYonTRJ4thRY1sAsXhsqUGqeOF9Ow0JSNw8zvpgmmHaLfa_CwHbTIK23sN_eKtQl3NkyIWLB_YH1nJbcPQ7LTpH5s1_-d-QYO839NJA-8hcp6-anvkLKsozqUH79bdbMxfwDqZ-uK |
linkProvider | Elsevier |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1NS8NAEB20IgoifuJn3YNHgzXZJJujiCXVtnio4C1sdjdQrU2xFfTfO7PZFAvSg5ccwuwmzC7z3iZvZgAuc4L1VqC9G6OlxxGTvEQGuJdDKRHQtG7ZXJheP0qf-cNL-LICd3UuDMkqXeyvYrqN1u7OtfPm9WQ4pBxfPIpTSSxhiQlfhTWqTsUbsHbbeUz784Acx1XWNNrTcSmqiw9ZmdfwdVQlAQpbu5Mq7vwNUFsTOUW3FVW_i18g1N6Bbcce2W31gruwYsZ7sG5VnGq6D29PkrRW6CpWYih4dzmWrCzYOwnvyI0YBUiJYQ3wQaNvZr4U8U6WfzPJpiSWL8dUBbb8YEitcS76VlvbswLhLpfq7QCe2_eDu9Rz3RQ8FQTBzEsER6g2WkV4lUrHQUzdEIz0Y6RBREuUT-xJCY6kSvPYhKYwgs6MSFpUGBxCY1yOzREwpEBFmPDCRCLiKrkRShRa4jR55EthxDH4tQsz5UqNU8eLUVZryl4z63fXBNPP0O_HcDUfNKkqbSw3j-q1yRY2TIZYsHxgc2El5w9DstOifmwn_535AjbSQa-bdTv9x1PYrP47kVTwDBqzj09zjvRlljfd9vwBfgXtcg |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Parameter+optimization+of+microcantilevers+optically+excited+by+a+semiconductor+laser+with+optical+feedback&rft.jtitle=Optik+%28Stuttgart%29&rft.au=Wang%2C+Shaoqing&rft.au=Wang%2C+Xiangzhao&rft.au=Liu%2C+Yingming&rft.au=Huang%2C+Bingjie&rft.date=2009-08-01&rft.issn=0030-4026&rft.volume=120&rft.issue=13&rft.spage=676&rft.epage=682&rft_id=info:doi/10.1016%2Fj.ijleo.2008.02.019&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_ijleo_2008_02_019 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0030-4026&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0030-4026&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0030-4026&client=summon |