Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications

• Published in: Journal of microelectromechanical systems Vol. 26; no. 5; pp. 966 - 986
• Main Authors: Dinh, Toan, Hoang-Phuong Phan, Qamar, Afzaal, Woodfield, Peter, Nam-Trung Nguyen, Dao, Dzung Viet
• Format: Journal Article
• Language: English
• Published: IEEE 01.10.2017
• Subjects: Conductivity; convective accelerometer; gyroscope; metal; Resistance; semiconductor; Sensitivity; Silicon; temperature sensor; Temperature sensors; thermal flow sensor; thermal sensor; Thermoresistive effect; two-dimensional (2-D) material

Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, tha...