Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications
Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, tha...
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| Published in | Journal of microelectromechanical systems Vol. 26; no. 5; pp. 966 - 986 |
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| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
IEEE
01.10.2017
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, thanks to its simplicity in implementation and high sensitivity. The effect of temperature on the electrical resistance of some metals and semiconductors has been thoroughly investigated, leading to the significant growth and successful demonstration of thermal-based sensors, such as temperature sensors, convective accelerometers and gyroscopes, and thermal flow sensors. In this paper, we review the fundamentals of the thermoresistive effect in metals and semiconductors. We also discuss the influence of design and fabrication parameters on the thermoresistive sensitivity. This paper includes several desirable features of thermoresistive sensors and recent developments in these sensors are summarized. This review provides insights into how it is affected by various parameters, and useful guidance for industrial designers in terms of high sensitivity and linearity and fast response. |
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| AbstractList | Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, thanks to its simplicity in implementation and high sensitivity. The effect of temperature on the electrical resistance of some metals and semiconductors has been thoroughly investigated, leading to the significant growth and successful demonstration of thermal-based sensors, such as temperature sensors, convective accelerometers and gyroscopes, and thermal flow sensors. In this paper, we review the fundamentals of the thermoresistive effect in metals and semiconductors. We also discuss the influence of design and fabrication parameters on the thermoresistive sensitivity. This paper includes several desirable features of thermoresistive sensors and recent developments in these sensors are summarized. This review provides insights into how it is affected by various parameters, and useful guidance for industrial designers in terms of high sensitivity and linearity and fast response. |
| Author | Nam-Trung Nguyen Dao, Dzung Viet Woodfield, Peter Dinh, Toan Hoang-Phuong Phan Qamar, Afzaal |
| Author_xml | – sequence: 1 givenname: Toan surname: Dinh fullname: Dinh, Toan email: toan.khac.dinh@gmail.com organization: Queensland Micro-Nanotechnol. Centre, Griffith Univ., Griffith, NSW, Australia – sequence: 2 surname: Hoang-Phuong Phan fullname: Hoang-Phuong Phan organization: Queensland Micro-Nanotechnol. Centre, Griffith Univ., Griffith, NSW, Australia – sequence: 3 givenname: Afzaal surname: Qamar fullname: Qamar, Afzaal organization: Queensland Micro-Nanotechnol. Centre, Griffith Univ., Griffith, NSW, Australia – sequence: 4 givenname: Peter surname: Woodfield fullname: Woodfield, Peter organization: Griffith Sch. of Eng., Griffith Univ., Griffith, NSW, Australia – sequence: 5 surname: Nam-Trung Nguyen fullname: Nam-Trung Nguyen organization: Queensland Micro-Nanotechnol. Centre, Griffith Univ., Griffith, NSW, Australia – sequence: 6 givenname: Dzung Viet surname: Dao fullname: Dao, Dzung Viet organization: Queensland Micro-Nanotechnol. Centre, Griffith Univ., Griffith, NSW, Australia |
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| Snippet | Microelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and... |
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| SubjectTerms | Conductivity convective accelerometer gyroscope metal Resistance semiconductor Sensitivity Silicon temperature sensor Temperature sensors thermal flow sensor thermal sensor Thermoresistive effect two-dimensional (2-D) material |
| Title | Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications |
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