Fast, micrometer scale characterization of group-III nitrides with laboratory X-ray diffraction

• Published in: Materials science & engineering. A, Structural materials : properties, microstructure and processing Vol. 524; no. 1; pp. 82 - 88
• Main Authors: Krost, Alois, Bläsing, Jürgen
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 25.10.2009
• Subjects: Concurrent X-ray diffraction (CXRD); Convergent beam optics; Grazing incidence in plane X-ray diffraction (GIIXRD); Group-III nitrides; Convergent beam optics; Concurrent X-ray diffraction (CXRD); Group-III nitrides; Grazing incidence in plane X-ray diffraction (GIIXRD)
• DOI: 10.1016/j.msea.2009.05.018
• ISSN: 0921-5093

We have designed a convergent beam, concurrent detection X-ray diffractometer. The instrument was built by Bruker AXS and is equipped with a rotating anode generator, a Johannson monochromator crystal for beam focusing, and a Soller slit arrangement in combination with a knife edge in front of the sample which defines the illuminated area on the sample. Samples up to 12 in. can be mounted on the sample stage of a D8 Eulerian cradle. A large area detector enables rapid simultaneous detection of the diffracted intensity. The instruments allow for a fast evaluation of large samples at high lateral resolution. In favourable cases lateral resolution down to 1 μm is possible. Furthermore a grazing incidence diffractometer has been developed which allows for depth-dependent measurements at high intensity.