Band gap narrowing induced by oxygen vacancies in reactively sputtered TiO2 thin films

• Published in: Thin solid films Vol. 769; p. 139737
• Main Authors: Mesoudy, Abdelouadoud El, Machon, Denis, Ruediger, Andreas, Jaouad, Abdelatif, Alibart, Fabien, Ecoffey, Serge, Drouin, Dominique
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 31.03.2023; Elsevier
• Subjects: Bandgap narrowing; Engineering Sciences; Oxygen vacancies; Physics; Reactive sputtering; Titanium dioxide; Urbach tails; Bandgap narrowing; Oxygen vacancies; Urbach tails; Reactive sputtering; Titanium dioxide

•TiO2 thin films were deposited by reactive magnetron sputtering.•Oxygen vacancy concentration was modulated by tuning the oxygen partial pressure.•Oxygen vacancies concentration narrows the optical bandgap of TiO2 films. Amorphous TiO2-x thin films were deposited using direct current reactive magne...