CrN/AlN nanolaminate coatings deposited via high power pulsed and middle frequency pulsed magnetron sputtering

• Published in: Thin solid films Vol. 572; pp. 153 - 160
• Main Authors: Bagcivan, N., Bobzin, K., Ludwig, A., Grochla, D., Brugnara, R.H.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.12.2014
• Subjects: Aluminum nitride; Chromium nitride; Coatings; CrAlN; CrN/AlN; Deposition; Hardness; HiPIMS; HPPMS; Magnetron sputtering; Nanolaminate; Nanostructure; Physical vapor deposition; PVD; Scanning electron microscopy; CrAlN; Nanolaminate; CrN/AlN; HPPMS; HiPIMS; PVD

Nanolaminate coatings based on transition metal nitrides such as CrN, AlN and TiN deposited via physical vapor deposition (PVD) have shown great advantage as protective coatings on tools and components subject to high loads in tribological applications. By varying the individual layer materials and...